Semiconductor Dummy Pattern Data Conversion Module
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Solution Overview
Problem
The existing semiconductor manufacturing processes face challenges in efficiently generating dummy-pattern data compatible with custom layout designs, requiring time-consuming code modifications and re-qualification of dummy-pattern-data generation tools.
Innovation Solution
A method and apparatus that utilize hardware circuits to convert custom design data sets into compatible design data sets, allowing the use of a standard dummy-pattern-data generation module without modifications, ensuring compatibility and efficient generation of dummy patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If code in the dummy-pattern-data generation tool is modified to accommodate custom layout files, then compatibility with custom designs is improved, but time consumption increases due to re-qualification requirements
Solution Approach 1:
The patent introduces an intermediary component (layout file adapter or conversion module) that translates custom layout file formats into the standard format expected by the existing dummy-pattern-data generation tool. This intermediary layer enables compatibility with custom designs without requiring modifications to the core tool, thereby avoiding time-consuming re-qualification while maintaining adaptability to different customer requirements
Solution Approach 2:
The system is segmented into distinct functional modules: a format conversion layer that handles custom layout file adaptation, and a core dummy-pattern-generation layer that remains unchanged. This segmentation allows the conversion layer to be modified or extended for different custom formats without affecting the qualified core tool, thus resolving the contradiction between adaptability and time consumption
2Loss of time
If a standard dummy-pattern-data generation module is used without modifications, then time consumption is reduced, but compatibility with custom layout designs deteriorates
Solution Approach 1:
A format translation intermediary is introduced between the custom layout file input and the standard dummy-pattern-data generation module. This intermediary automatically converts custom formats to the standard format, allowing the use of the unmodified, time-efficient standard module while maintaining full compatibility with custom designs
Solution Approach 2:
The system creates a transformed copy of the custom layout data in the standard format required by the existing tool. Instead of modifying the original tool or working directly with custom formats, the system generates a compatible copy that the standard module can process efficiently, thus preserving both time efficiency and compatibility
Data Source
AI summary
A method for facilitating semiconductor device manufacturing may include the following steps: receiving a custom design data set, which complies with a first element-identification scheme; generating a compatible design data set using the custom design data set, wherein data elements in the compatible design data set correspond to data elements in the custom design data set, and wherein the compatible design data set is compatible with a dummy-pattern-data generation module; generating a first dummy-pattern data set using the dummy-pattern-data generation module and the compatible design data set; and generating a second dummy-pattern data set using the first dummy-pattern data set, wherein data elements in the second dummy-pattern data set correspond to data elements in the first dummy-pattern data set, and wherein the second dummy-pattern data set complies with the first element-identification scheme.