Semiconductor Shielding via Conductive Coating for EMI Reduction

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Solution Overview

Problem

Advanced semiconductor devices face challenges in minimizing electromagnetic interference (EMI) due to increased integration density and component density, which affects the electrical performance and noise levels in compact electronic devices.

Innovation Solution

A semiconductor device design incorporating a conductive coating with multiple sublayers, including an interface layer, barrier layer, and conductive layer, is applied over the semiconductor dies and sidewalls to provide electromagnetic shielding, reducing EMI and enhancing signal propagation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If integration density and component density are increased to achieve smaller device size, then device compactness is improved, but electromagnetic interference increases affecting electrical performance

Engineering Contradiction:
Improvedevice sizeVSAvoidelectromagnetic interference
Core Design Contradiction:
Volume of moving objectVSObject-affected harmful factors

Solution Approach 1:

The semiconductor device is divided into multiple functional packages (first package and second package) stacked vertically, with each package containing specific components. This segmentation allows EMI shielding structures to be strategically placed between packages and within individual packages, effectively isolating electromagnetic interference while maintaining compact overall device size.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple functional layers are nested within each other, including conductive shielding layers embedded within dielectric materials, and multiple packages stacked within a compact footprint. The EMI shielding structure is nested between the first and second packages, providing protection without significantly increasing the device's external dimensions.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If EMI shielding structures are added to reduce electromagnetic interference, then electrical performance is improved, but package size increases

Engineering Contradiction:
Improveelectrical performanceVSAvoidpackage size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

EMI shielding structures are applied locally at critical interfaces between packages and around sensitive conductive paths, rather than uniformly throughout the entire device. Conductive layers are strategically positioned at sidewalls of packages and within dielectric regions where EMI protection is most needed, maintaining compact overall dimensions while providing effective shielding.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Thin conductive shielding layers are used instead of bulky shielding materials. These thin film conductive layers are embedded within dielectric materials and positioned at package sidewalls, providing effective EMI protection with minimal increase in package volume.

Inventive Principle:
Principle #30Flexible shells and thin films

3Reliability

If multiple conductive paths are shortened to improve signal propagation, then electrical performance is improved, but device complexity increases

Engineering Contradiction:
Improvesignal propagationVSAvoidrouting complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Conductive paths are routed through the vertical dimension by utilizing vias that penetrate dielectric layers between packages and within packages. This three-dimensional routing approach shortens signal paths compared to traditional planar routing, improving signal propagation while the modular package structure helps manage the increased routing complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces electromagnetic interference, improves signal integrity, and maintains the compact form factor of semiconductor devices by integrating EMI shielding without significant increases in package size or manufacturing complexity.

Implementation Method 1

a conductive coating with multiple sublayers, including an interface layer, barrier layer, and conductive layer, is applied over the semiconductor dies and sidewalls to provide electromagnetic shielding, reducing EMI and enhancing signal propagation

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Data Source

PatentUS11527486B2Semiconductor device with shield for electromagnetic interference
Publication Date: 2022.12.13 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11527486B2 patent drawing
  • US11527486B2 patent drawing
  • US11527486B2 patent drawing

AI summary

A semiconductor device includes a first die embedded in a molding material, where contact pads of the first die are proximate a first side of the molding material. The semiconductor device further includes a redistribution structure over the first side of the molding material, a first metal coating along sidewalls of the first die and between the first die and the molding material, and a second metal coating along sidewalls of the molding material and on a second side of the molding material opposing the first side.