Semiconductor EMI Shielding Structure for Reliable Interconnections

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Solution Overview

Problem

Existing semiconductor devices and manufacturing methods are inefficient, leading to time-consuming and costly processes, resulting in unreliable connections and suboptimal interconnection structures.

Innovation Solution

The implementation of a semiconductor device manufacturing method that includes forming conductive shielding members and an electromagnetic interference (EMI) shielding layer, with the conductive shielding members positioned between electronic components to enhance lateral EMI shielding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional manufacturing methods are used, then the manufacturing process is simpler, but the connections are unreliable and the interconnection structures are suboptimal

Engineering Contradiction:
Improveconnection reliabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by forming conductive shielding members and EMI shielding layers during the manufacturing process before final assembly. This prevents electromagnetic interference issues from developing later, ensuring reliable connections while managing manufacturing complexity through proactive rather than reactive measures.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces conductive shielding members and EMI shielding layers as intermediary elements between electronic components. These intermediaries actively manage electromagnetic interference, improving connection reliability without requiring fundamental changes to the core manufacturing process.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If existing manufacturing processes are used, then the process is faster and less costly, but the connections are unreliable

Engineering Contradiction:
Improveconnection reliabilityVSAvoidmanufacturing efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent merges EMI shielding functionality with existing manufacturing processes by forming conductive shielding members and shielding layers during standard fabrication steps. This integration improves connection reliability without requiring separate, time-consuming shielding processes, thus maintaining manufacturing efficiency.

Inventive Principle:
Principle #5Merging (Combining)

3Object-affected harmful factors

If conventional EMI shielding is used, then the structure is simpler, but the EMI shielding is insufficient

Engineering Contradiction:
ImproveEMI shielding effectivenessVSAvoidshielding structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent enhances EMI shielding by introducing conductive shielding members positioned between electronic components in addition to EMI shielding layers. This multi-dimensional approach—combining lateral shielding members with planar shielding layers—provides superior EMI protection compared to conventional single-layer shielding without excessive complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS12341107B2Semiconductor device and method of manufacturing thereof
Publication Date: 2025.06.24 AMKOR TECH SINGAPORE HLDG PTE LTD
  • US12341107B2 patent drawing
  • US12341107B2 patent drawing
  • US12341107B2 patent drawing

AI summary

A semiconductor device and a method of manufacturing a semiconductor device. As a non-limiting example, various aspects of this disclosure provide a semiconductor device comprising one or more conductive shielding members and an EMI shielding layer, and a method of manufacturing thereof.