Multi-Stage By-Product Collection Tower for Semiconductor Exhaust
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Solution Overview
Problem
In semiconductor manufacturing, existing by-product collection apparatuses struggle to completely remove particulate by-products from exhaust gases, leading to increased exhaust pressure, pump breakdowns, and contamination, especially as reaction gas amounts increase.
Innovation Solution
An apparatus is installed between the primary by-product collection apparatus and the vacuum pump, featuring a diffusion plate, disc type collector, cylindrical collector, and cylindrical filter collector, which alters the exhaust gas flow path to allow for multiple collection stages and extended path lengths, ensuring thorough removal of non-collected by-products before they reach the vacuum pump.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a primary by-product collection apparatus is used to collect particulate by-products from exhaust gas, then by-products are removed from the exhaust gas, but non-collected by-products remain and can damage the vacuum pump
Solution Approach 1:
The collection apparatus is divided into multiple independent collection units (first, second, and third collection units) with different collection mechanisms. Each unit handles specific types or sizes of by-products, allowing for more effective multi-stage filtration without requiring a single complex device
Solution Approach 2:
The collection units are arranged in a nested or sequential configuration where exhaust gas passes through multiple collection stages in sequence. The first collection unit processes the exhaust gas initially, then subsequent units further refine the gas, creating a layered protection system for the vacuum pump
2Productivity
If the exhaust gas flow path is shortened to improve gas flow speed, then productivity increases, but by-products are not completely removed before reaching the pump
Solution Approach 1:
The apparatus utilizes vertical space arrangement with collection units positioned at different heights and levels. The exhaust gas flows downward through multiple horizontal and vertical stages, effectively increasing the flow path length and collection opportunities without significantly increasing the horizontal footprint or reducing processing speed
3Productivity
If reaction gas amount is increased to improve manufacturing productivity, then more by-products are generated, but the existing collection apparatus cannot completely remove the increased by-product load
Solution Approach 1:
Multiple collection units with different collection capacities and mechanisms are deployed in sequence. The first collection unit handles the bulk of by-products, while subsequent units capture remaining particulates, creating a scalable system that can handle increased by-product loads from higher reaction gas volumes
Solution Approach 2:
The collection apparatus uses different collection mechanisms or media in different units (e.g., different filter types, collection methods, or materials). This composite approach allows the system to handle diverse by-product compositions and quantities that result from increased reaction gas amounts
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents damage to the vacuum pump by ensuring complete removal of by-products, reducing the risk of contamination and maintaining equipment integrity, even with increased reaction gas volumes.
Implementation Method 1
a diffusion plate positioned at a center portion
Implementation Method 2
a disc type collector positioned at an upper portion
Implementation Method 3
a cylindrical collector and a cylindrical filter collector positioned at a lower portion
Data Source
AI summary
The apparatus for collecting by-products of the present disclosure includes: a cylindrical housing that has a top plate having a gas inlet and a bottom plate having a gas outlet extending and protruding inside the housing, and receives and then discharges an exhaust gas flowing inside; and a flow path change-type vertical internal collection tower that is installed in a hanging state inside the housing and includes a disc type collector, a diffusion plate, a cylindrical collector, and a cylindrical filter collector for collecting by-products in an exhaust gas flowing inside.