Semiconductor Exhaust Structure with Automatic Overpressure Venting
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Solution Overview
Problem
In semiconductor manufacturing processes, over-pressurization of the exhaust pipe is a concern due to difficulties in confirming the vacuum state, leading to potential damage and reduced operating efficiency of the apparatus.
Innovation Solution
An exhaust structure with a pressure detector and branch pipe connected to a vent pipe, which releases excess pressure to prevent over-pressurization, protecting the exhaust system components from deformation and maintaining operational efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gas is supplied to the exhaust pipe without confirming the vacuum state, then the exhaust pipe becomes over-pressurized, but the operator cannot detect the closed valve state
Solution Approach 1:
A pressure detector is installed on the exhaust pipe to act as an intermediary that automatically detects pressure changes and provides feedback to the control unit, eliminating the need for manual vacuum state confirmation by the operator
Solution Approach 2:
The control unit receives feedback from the pressure detector about the exhaust pipe pressure state and automatically opens the opening/closing part when over-pressurization is detected, creating a closed-loop control system that prevents operator error
2Reliability
If a regulator is installed on the exhaust pipe to regulate pressure, then pressure control is improved, but the system complexity increases
Solution Approach 1:
The opening/closing part automatically responds to pressure detector signals and opens when over-pressurization occurs, allowing the system to self-regulate and protect itself without requiring additional complex control mechanisms or manual intervention
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents over-pressurization of the exhaust pipe, reducing maintenance needs and maintaining apparatus uptime by safely releasing excess pressure, thus enhancing operational reliability.
Implementation Method 1
a pressure detector installed on the exhaust pipe at a downstream of the regulator and configured to detect the pressure inside the exhaust pipe
Implementation Method 2
a vent pipe installed to be branched off from the exhaust pipe at an upstream of the regulator... the branch pipe is configured to be connected to the vent pipe
Data Source
AI summary
There is provided a structure that includes: an exhaust pipe configured to exhaust an atmosphere of a process chamber; a regulator installed on the exhaust pipe and configured to regulate a pressure inside the process chamber; a vent pipe installed to be branched off from the exhaust pipe at an upstream of the regulator; a pressure detector installed on the exhaust pipe at a downstream of the regulator and configured to detect the pressure inside the exhaust pipe; and a branch pipe including an opening/closing part configured to operate in response to a signal from the pressure detector, the branch pipe branching off from the exhaust pipe at the downstream of the regulator, wherein the branch pipe is configured to be connected to the vent pipe.