Semiconductor fabrication apparatus
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Solution Overview
Problem
Existing semiconductor fabrication apparatuses face issues with inaccurate temperature control and refrigerant shortages, leading to potential stopping of the fabrication process due to disorders in the chiller system.
Innovation Solution
A semiconductor fabrication apparatus with multiple refrigerant suppliers, mixers, and a common reservoir, where heaters and coolers are connected in parallel to supply high and low-temperature refrigerants, allowing for continuous operation even if one component fails, and a system for balancing refrigerant amounts between reservoirs to maintain set temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single chiller is serially connected to one chamber, then the system structure is simple, but the reliability is poor because any issue with the chiller causes stopping of the semiconductor fabrication
Solution Approach 1:
The system divides the refrigerant supply function into multiple independent chillers (first chiller and second chiller), each capable of supplying refrigerant to the chamber. This segmentation ensures that if one chiller fails, the other can maintain the fabrication process, thereby improving reliability while managing complexity through modular design
Solution Approach 2:
The system prepares redundant refrigerant supply capacity in advance by having both chillers operational and connected to the chamber. This prior cushioning ensures that if one chiller develops an issue, the other is already in place to immediately take over, preventing fabrication process interruption
2Reliability
If refrigerant is supplied from a single source, then the system complexity is low, but the reliability is poor because refrigerant shortage can stop the fabrication process
Solution Approach 1:
The refrigerant supply system is segmented into multiple independent sources (first refrigerant supplier and second refrigerant supplier), each capable of providing refrigerant to the chamber. This ensures that if one supplier experiences a shortage or failure, the other can compensate, maintaining continuous operation
Solution Approach 2:
The system can dynamically change the refrigerant supply parameters by adjusting the contribution from each supplier based on their operational status and efficiency. This allows optimization of the refrigerant supply mix while maintaining reliability
3Measurement precision
If temperature control is performed by a single chiller, then the control system is simple, but the temperature control accuracy is insufficient leading to fabrication faults
Solution Approach 1:
The temperature control function is divided between multiple chillers that can operate simultaneously or in coordination. This segmentation allows for finer control over the refrigerant supply characteristics, improving temperature control accuracy while maintaining manageable system complexity through coordinated operation
Solution Approach 2:
Each chiller is designed to perform multiple functions: primary refrigerant supply, backup supply, and adjustable temperature control. This multi-functionality allows the system to achieve high temperature control accuracy by having multiple components that can be independently adjusted to meet precise temperature requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures stable temperature control and continuous operation of the semiconductor fabrication process by allowing redundant refrigerant supply and balancing refrigerant distribution, preventing process interruptions.
Implementation Method 1
a heater configured to heat the refrigerant
Implementation Method 2
a cooler configured to cool the refrigerant
Implementation Method 3
a mixer configured to mix the high-temperature refrigerant and the low-temperature refrigerant
Data Source
AI summary
A semiconductor fabrication apparatus may include a plurality of refrigerant suppliers, a plurality of mixers, a plurality of chambers and a common reservoir. The mixers may commonly receive a refrigerant from the refrigerant suppliers. The chambers may be connected to one of the mixers. The common reservoir may supply the refrigerant to the refrigerant suppliers. The common reservoir may collect the refrigerant from the chambers.