Automated Semiconductor Facility Layout Across Multi-Level Floors
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Solution Overview
Problem
The complexity of semiconductor factory layouts increases with the size of the factory, leading to higher time and cost requirements for manual facility layout determination across multiple floors, including main, clean sub-FAB, and facility sub-FAB floors.
Innovation Solution
A method and system for determining facility layouts in semiconductor factories using processors to receive and process data for main, clean sub-FAB, and facility sub-FAB facilities, determining positions for each facility type based on specific zones and connection members, and generating layout drawings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual operation is used to determine facility layout, then flexibility and adaptability are maintained, but time consumption and cost increase as factory size grows
Solution Approach 1:
An automated layout determination system acts as an intermediary between facility requirements and layout design. The system receives facility data, processing zone information, and floor structure details, then automatically generates optimized layouts for main facilities on the main floor and subsidiary facilities on CSF and FSF floors, dramatically reducing manual operation time while maintaining design quality
Solution Approach 2:
The patent replaces the manual mechanical process of layout determination with an automated computer-based system. The processor executes algorithms that automatically determine facility positions and arrangements based on input data, substituting human manual operations with automated computational processes to reduce time consumption
2Productivity
If factory size and number of facilities increase, then production capacity improves, but layout complexity and determination cost increase
Solution Approach 1:
The patent segments the facility layout determination into distinct hierarchical levels: main facilities on the main floor, CSF subsidiary facilities on the clean sub-FAB floor, and FSF subsidiary facilities on the facility sub-FAB floor. Each segment is determined separately based on its specific requirements, making the overall complex layout manageable through systematic division
Solution Approach 2:
The patent utilizes vertical dimensionality by distributing facilities across multiple floors (main floor, CSF floor, FSF floor). This three-dimensional arrangement allows the system to handle increased facility quantities by adding vertical space utilization rather than only expanding horizontally, thereby managing layout complexity through spatial dimensionality
3Loss of time
If automated layout determination is implemented, then time and cost are reduced, but system complexity increases
Solution Approach 1:
The automated layout determination system is designed with multi-functionality to handle various facility types, floor configurations, and layout requirements through a single integrated platform. The system can process main facilities, CSF subsidiary facilities, and FSF subsidiary facilities using the same core determination logic, reducing the need for multiple separate systems
Data Source
AI summary
A method of determining a facility layout of a semiconductor factory including a main floor including processing zones, a clean sub-FAB (CSF) floor under the main floor, and a facility sub-FAB (FSF) floor under the CSF floor includes receiving data related to main facilities to be placed on the main floor, CSF subsidiary facilities to be placed on the CSF floor, and FSF subsidiary facilities to be placed on the FSF floor, and determining the facility layout including a layout of the main facilities for the main floor, a layout of the CSF subsidiary facilities for the CSF floor, and a layout of the FSF subsidiary facilities for the FSF floor.