Semiconductor Fault Detection via SECS Data Transformation
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Solution Overview
Problem
Conventional fault detection and classification systems in semiconductor fabrication processes are inefficient due to passive data reception and the need for workers to master multiple communication standards, leading to delayed equipment maintenance and reduced product yield.
Innovation Solution
A real-time fault detection and classification system that includes a tool simulator to transform status data from non-SECS compliant tools into SECS compliant data, allowing a CIM host to actively receive and classify equipment health conditions using only the SECS standard, thereby simplifying data analysis and enabling timely maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If workers analyze status data from multiple communication standards (SECS and OLE/ODBC), then equipment health conditions can be determined, but the complexity of operation increases and workers need to master multiple standards
Solution Approach 1:
The patent introduces a data converter as an intermediary component between the facility monitoring control system and the CIM host. This converter translates status data from OLE/ODBC format into SECS format, allowing the CIM host to process all data uniformly using only SECS protocol knowledge. This resolves the contradiction by maintaining reliable equipment health determination while simplifying worker operations to a single standard.
2Device complexity
If the CIM host passively receives status data, then the system architecture is simple, but fault detection is delayed and product yield decreases
Solution Approach 1:
The patent implements a proactive fault detection mechanism where the CIM host actively sends inquiry commands to the semiconductor tool before faults occur. This preliminary action enables early detection of equipment anomalies, allowing timely maintenance interventions that prevent defects and improve product yield, while maintaining relatively simple system architecture.
3Adaptability or versatility
If multiple communication standards are used for data transfer, then adaptability of the system increases, but the device complexity increases
Solution Approach 1:
The data converter serves as a protocol mediation layer that interfaces with multiple communication standards (SECS from semiconductor tools and OLE/ODBC from facility monitoring systems) while presenting a unified SECS interface to the CIM host. This intermediary approach maintains high adaptability to different data sources while containing complexity within the converter component rather than throughout the entire system.
Data Source
AI summary
A real-time fault detection and classification (FDC) system, which is in use with a semiconductor fabrication process having a first sub-fabrication process and a second sub-fabrication process, includes a computer integrated manufacturing (CIM) host adopting a SEMI equipment communication standard (SECS), a semiconductor tool for executing the first sub-fabrication process and generating first status data in conformity with the SECS, a non-semiconductor tool for executing the second sub-fabrication process and generating second status data in conformity with a predetermined connectivity standard different from the SECS, and a tool simulator connecting the tool simulator with the semiconductor tool and the non-semiconductor tool for receiving the first and second status data and transforming the second status data into third status data in conformity with the SECS such that the CIM host can classify the first and third status data according to a predetermined classification technique and get a control over equipment health conditions of the semiconductor tool as well as the non-semiconductor tool.