Semiconductor Filter for X-ray Absorption in Testing
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Solution Overview
Problem
Existing X-ray systems cause degradation of semiconductor devices due to the absorption of soft X-rays, which affects the quality of images obtained and the reliability of semiconductor packages during testing.
Innovation Solution
Incorporating a semiconductor filter, which can be plate-shaped or granular and made of materials like Si, Ge, GaAs, InP, or InGaAsP, into the X-ray system, semiconductor package, or tray, to absorb soft X-rays and allow hard X-rays to pass through, thereby reducing device degradation and improving image clarity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a filter is added to absorb soft X-rays, then semiconductor device degradation is reduced, but device complexity increases
Solution Approach 1:
A semiconductor filter is introduced as an intermediary component between the X-ray source and the semiconductor device. This filter selectively absorbs soft X-rays (which cause degradation) while allowing hard X-rays (needed for imaging) to pass through. The filter acts as a mediator that separates the harmful and useful portions of the X-ray spectrum, resolving the contradiction by protecting the device without preventing necessary imaging.
Solution Approach 2:
The patent employs composite filtering structures that combine different materials with varying X-ray absorption characteristics. By using composite materials, the system achieves selective absorption of soft X-rays while maintaining transmission of hard X-rays, thereby reducing device degradation without significantly increasing overall system complexity.
2Reliability
If a semiconductor filter is used to shield degrading wavelengths, then device reliability improves, but manufacturing complexity increases
Solution Approach 1:
The semiconductor filter serves multiple functions simultaneously: it acts as both a protective shield against soft X-rays and a structural component of the X-ray system. By making the filter multi-functional, the patent reduces the need for additional separate components, thereby improving device reliability while minimizing the increase in manufacturing complexity.
Solution Approach 2:
The patent optimizes the filter's physical parameters (thickness, material composition, density) to achieve the desired X-ray absorption characteristics. By carefully controlling these parameters, the filter provides effective protection against degradation while maintaining manufacturability within standard fabrication capabilities.
3Measurement precision
If soft X-rays are absorbed by the filter, then image quality improves, but X-ray intensity reaches the detector
Solution Approach 1:
The filter is designed with spatially varying properties (different thicknesses or material compositions in different regions) to optimize both image quality and X-ray intensity distribution. This local quality variation allows the filter to selectively improve image quality in critical areas while maintaining sufficient X-ray intensity for overall detection.
Solution Approach 2:
The filter provides partial absorption of soft X-rays rather than complete blockage. This partial action is sufficient to improve image quality by reducing degradation effects while allowing enough X-ray energy to reach the detector for maintaining adequate signal strength for imaging.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The semiconductor filter effectively transmits necessary X-rays for imaging while shielding degrading wavelengths, reducing semiconductor device degradation and enhancing image quality in X-ray testing systems.
Implementation Method 1
the filter includes a plate-shaped semiconductor, a granular semiconductor, or a combination thereof... Si, Ge, GaAs, InP, InGaAs, InGaAsP... to absorb soft X-rays and allow hard X-rays to pass through
Data Source
AI summary
An X-ray source is disposed and a detector is disposed adjacent to the X-ray source. A test specimen holder is disposed between the X-ray source and the detector. A filter is disposed between the X-ray source and the test specimen holder. The filter has a plate-shaped semiconductor, a granular semiconductor, or a combination thereof.