Fluid Flow Measurement Apparatus for Semiconductor Pipe
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing flow meters in semiconductor manufacturing devices face challenges in accurately measuring fluid flow due to turbulences and contaminations in pipes, which lead to noisy signal readings and measurement complications.
Innovation Solution
An apparatus with a sealing structure and chambers upstream and downstream of the flow structure, which measures fluid pressures in these chambers to determine flow rates, minimizing the impact of turbulences and contaminations, and includes a flow structure that forms a restriction to cause pressure changes for flow measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If differential pressure flow meters are used to measure fluid flow in pipes, then fluid flow measurement is enabled, but measurement precision deteriorates due to turbulences and contaminations causing noisy signal readings
Solution Approach 1:
The pipe is segmented into multiple measurement sections with separate pressure measurement points. By dividing the continuous flow measurement into discrete sections upstream and downstream of the restriction, the system can isolate turbulent regions from the measurement zones, capturing only the stable pressure differential needed for accurate flow calculation.
Solution Approach 2:
Chambers are introduced as intermediary elements between the turbulent fluid flow and the pressure sensors. These chambers act as buffer zones that smooth out pressure fluctuations caused by turbulences and prevent direct exposure of sensors to contaminated fluid, thereby protecting the measurement system while maintaining measurement capability.
2Reliability
If pressure measurement ports are exposed to the fluid stream for flow measurement, then fluid flow can be measured, but reliability deteriorates due to contamination obstructing pressure measurement ports
Solution Approach 1:
Chambers serve as intermediary spaces that decouple the pressure measurement ports from direct contact with contaminated fluid. The chambers capture pressure information from the fluid stream while maintaining a physical barrier that prevents contaminants from reaching and obstructing the measurement ports, thus preserving system reliability.
Solution Approach 2:
The chamber structure creates a protected environment for pressure sensors using enclosed spaces with controlled openings. This shell-like structure allows pressure transmission while filtering out larger contaminants, protecting the measurement system from contamination without compromising measurement accuracy.
3Measurement precision
If chambers are introduced to shield pressure measurements from turbulences, then measurement precision improves, but device complexity increases
Solution Approach 1:
The measurement chambers are merged with the existing pipe structure rather than being added as separate external components. By integrating the chambers into the pipe wall or combining them with existing fittings, the design achieves turbulence shielding functionality while minimizing additional structural complexity and maintaining a compact overall form.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for accurate and undisturbed measurement of fluid flow, reducing noise and interference from turbulences and contaminations, enabling stable control of fluid flow rates in semiconductor manufacturing processes.
Implementation Method 1
The flow structure forms a restriction of the pipe, which the fluid has to pass through in order to get past the sealing structure. This causes a pressure increase in-front of the fluid inlet and in the first chamber, and a pressure decrease behind the fluid outlet and in the second chamber.
Implementation Method 2
Flow meters are typically used to measure the fluid flow through such exhaust pipes. The flow meters are usually differential pressure flow meters, which measure the pressure difference of a fluid in the pipe upstream and downstream of a constriction of the pipe.
Data Source
AI summary
Disclosed is an apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device, in particular a coater or a bonder. The apparatus includes a sealing structure arranged in the pipe, a flow structure having a fluid inlet arranged upstream of the sealing structure and a fluid outlet arranged downstream of the sealing structure, a first chamber arranged in the pipe upstream of the sealing structure, and a second chamber arranged in the pipe downstream of the sealing structure, and a measuring device, wherein the measuring device is adapted to measure a first fluid pressure in the first chamber and a second fluid pressure in the second chamber, wherein the measuring device is configured to determine the fluid flow based on the first and second fluid pressure.