Semiconductor Process Fluid Recycling Apparatus
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Solution Overview
Problem
Semiconductor manufacturers face challenges in recycling process fluids due to concerns about contamination and the complexity of operations required to reuse fluids, which has outweighed the benefits of recycling, especially with the use of costly non-traditional solutions like cobalt solutions for addressing electromigration in copper interconnects.
Innovation Solution
A method and apparatus for recycling semiconductor process fluids by measuring the condition of used fluids with sensors and controlling their recycling or diversion based on predetermined ranges, utilizing a reclaim line, recycle line, tank, and controller to ensure fluid quality before reusing it in semiconductor process tools.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If process fluids are recycled to reduce costs, then manufacturing cost is reduced, but contamination risk increases due to particles, metals and fluid degradation
Solution Approach 1:
The system continuously monitors fluid conditions (particles, metals, degradation) and uses this feedback to control valve actuation, deciding when to recycle and when to drain fluid based on real-time quality assessment
Solution Approach 2:
The system changes the operational state of the fluid by monitoring parameters such as particle count, metal content, and degradation markers, switching between recycle and drain modes based on whether these parameters remain within acceptable ranges
2Reliability
If complex operations are performed to reclaim and recycle fluids, then fluid quality is maintained, but device complexity and operational complexity increase
Solution Approach 1:
The system extracts only the essential function of quality monitoring and control, separating the decision-making logic (controller based on sensor input) from complex physical treatment processes, thereby maintaining fluid quality without requiring elaborate reclaim equipment
Solution Approach 2:
The system uses automated sensors and controllers to self-regulate the recycling process, eliminating the need for complex manual operations or elaborate equipment while maintaining fluid quality through intelligent control
3Manufacturing precision
If sensors and controllers are used to monitor fluid conditions, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The system replaces complex mechanical monitoring and control mechanisms with electronic sensors and controllers, achieving precise fluid condition monitoring and control while actually reducing overall system complexity through the use of modern electronic control technology
Data Source
AI summary
A method and apparatus for recycling a process fluid from a drain of a semiconductor process tool. The process fluid may be an acidic cobalt solution or an electroless cobalt solution used in a semiconductor process step to prevent electromigration in copper interconnects. The used process fluid is collected from the tool drain and recycled back to the tool inlet if a condition of the fluid is within a predetermined range. Otherwise, the used process fluid is drained from the system. The system may also operate in a bleed and feed mode where a portion of the used process fluid is periodically drained from the system.