Integrated Semiconductor Fluorescence Detector with Evanescent Waveguide
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Solution Overview
Problem
There is a need for a compact fluorescence detector that can be completely manufactured using semiconductor manufacturing processes, as existing detectors contain components that cannot be fabricated using these processes.
Innovation Solution
The development of an integrated semiconductor device with layers including a detector element, a rejection filter, an optical waveguide, and a microfluidic channel, all fabricated using CMOS compatible processes, where the optical waveguide is configured to activate fluorescent tags and the rejection filter separates excitation light from fluorescence, allowing for efficient detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If traditional fluorescence detectors are used, then detection sensitivity is achieved, but manufacturing compatibility with semiconductor processes is lost
Solution Approach 1:
The patent merges the fluorescence detection components (waveguide, filter, detector) into a single integrated semiconductor device that can be manufactured using standard CMOS processes. The waveguide is formed by depositing and patterning dielectric layers with different refractive indices on the detector surface, integrating multiple functions into one manufacturable structure.
Solution Approach 2:
The patent replaces traditional mechanical/optical assembly methods with semiconductor fabrication processes. Instead of assembling separate optical components, the detection structure is created through depositing, patterning, and etching dielectric layers directly on the detector, enabling full semiconductor manufacturing compatibility.
2Volume of moving object
If device compactness is increased, then integration density improves, but optical path length for fluorescence detection decreases
Solution Approach 1:
The patent transitions from three-dimensional optical path propagation to two-dimensional evanescent field interaction. The waveguide confines light in horizontal dimensions while the evanescent tail extends vertically to interact with fluorescent tags, enabling compact integration without sacrificing detection capability.
Solution Approach 2:
The patent introduces the evanescent field as an intermediary between the guided light and the fluorescent tags. This field extension allows optical interaction to occur at the waveguide surface rather than requiring long propagation paths, enabling compact device design while maintaining detection sensitivity.
3Illumination intensity
If excitation light intensity is increased, then fluorescence activation improves, but background noise from scattered excitation light increases
Solution Approach 1:
The patent applies local quality by positioning the rejection filter specifically in the optical path between the waveguide and detector. The filter is configured to reject excitation light wavelengths while transmitting fluorescence wavelengths, providing localized wavelength-selective filtering exactly where needed to eliminate background noise without affecting excitation intensity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables the creation of a compact fluorescence detector that can be fully manufactured using semiconductor processes, facilitating the detection of biological particles like DNA, RNA, proteins, and cells with improved sensitivity and accuracy.
Implementation Method 1
The optical waveguide is configured and positioned such that a top surface of the fourth layer is illuminated with an evanescent tail of excitation light guided by the optical waveguide for activating the fluorescent tags
Implementation Method 2
The rejection filter is configured to reject the wavelength range of the excitation light and configured to transmit the wavelength range of fluorescence from the activated fluorescent tags
Implementation Method 3
fluorescent detection is performed, for instance, on fluorescent tags attached to biological molecules
Implementation Method 4
The detector element is positioned such that light from the activated fluorescent tags can be received
Data Source
AI summary
The present disclosure relates to semiconductor devices for detecting fluorescent particles. At least one embodiment relates to an integrated semiconductor device for detecting fluorescent tags. The device includes a first layer, a second layer, a third layer, a fourth layer, and a fifth layer. The first layer includes a detector element. The second layer includes a rejection filter. The third layer is fabricated from dielectric material. The fourth layer is an optical waveguide configured and positioned such that a top surface of the fourth layer is illuminated with an evanescent tail of excitation light guided by the optical waveguide when the fluorescent tags are present. The fifth layer includes a microfluidic channel. The optical waveguide is configured and positioned such that the microfluidic channel is illuminated with the evanescent tail. The detector element is positioned such that light from activated fluorescent tags can be received.