Semiconductor Gas Connector Alignment With Non-Contact Sealing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Contact between concave and convex surfaces of connectors in gas pipelines can occur during mating, leading to debris entry into the process chamber and reduced product quality in semiconductor process equipment.
Innovation Solution
A semiconductor process equipment design featuring a first and second connector with a connecting device that includes a first and second clamping member, utilizing a positioning column and hole for alignment, and a gap between the connectors to prevent contact, along with a sealing ring for enhanced sealing and a matching protrusion and groove for fool-proof mating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If concave and convex surfaces are used for connector mating, then coaxial alignment is ensured, but contact between surfaces occurs during mating causing debris generation
Solution Approach 1:
A positioning column and positioning hole mechanism is introduced as an intermediary between the connectors. The positioning column fits into the positioning hole to establish coaxial alignment, while the connectors themselves remain separated by a gap. This intermediary positioning mechanism eliminates direct contact between the connector surfaces, preventing debris generation while maintaining alignment precision.
2Reliability
If connectors are brought into direct contact for sealing, then sealing fit is achieved, but contact causes debris that enters process chamber
Solution Approach 1:
A sealing ring is introduced as an intermediary element between the first and second connectors. The sealing ring makes contact with both connectors to establish the sealing fit, while the connectors themselves are kept apart by a gap. This intermediary sealing mechanism prevents direct contact between connectors, eliminating debris generation while maintaining sealing reliability.
3Object-generated harmful factors
If gap is provided between connectors, then contact is avoided, but alignment precision may be compromised
Solution Approach 1:
The alignment and sealing functions are segmented into separate components: the positioning column and positioning hole handle alignment, while the sealing ring handles sealing. This segmentation allows the connectors to be separated by a gap (avoiding contact) while the positioning mechanism ensures precise coaxial alignment is maintained independently of the gap.
Data Source
Figure 1~2
Figure 3~4
Figure 5~6
AI summary
There is provided a semiconductor process equipment, including a process chamber (100), a first connector (210), a second connector (220), and a connecting device (300), the first connector (210) is connected to the process chamber (100), the connecting device (300) includes a first clamping member (330), a second clamping member (340), and a connecting assembly (350), the first clamping member (330) is sleeved on the first connector (210), the second clamping member (340) is sleeved on the second connector (220), one of the first clamping member (330) and the second clamping member (340) is provided with a positioning column (331), the other of the first clamping member (330) and the second clamping member (340) is provided with a positioning hole (341), the positioning column (331) is in positioning fit with the positioning hole (341) to make a central axis of the first connector (210) coincide with a central axis of the second connector (220), a gap is provided between the first connector (210) and the second connector (220), and one end of the positioning column (331) penetrates through the positioning hole (341) to be connected to the connecting assembly (350) to enable clamping of the first connector (210) and the second connector (220). The present disclosure can solve a problem that contact can be easily caused in a mating process of a gas pipeline of an existing semiconductor process equipment.