Semiconductor Gas Detection Device with Integrated MEMS and Optical Sensing
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Solution Overview
Problem
Current air quality monitoring technologies lack miniaturized, portable solutions for real-time detection of hazardous gases and suspended particles, which are essential for immediate health safety in various environments.
Innovation Solution
A miniaturized gas detection device manufactured by a semiconductor process, comprising a substrate with integrated microelectromechanical, light-emitting, particle-sensing, and gas-sensing elements, along with a driving-chip element and encapsulation layer, enabling real-time monitoring of air quality through gas transportation, light scattering detection, and hazardous gas detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional gas sensing technologies are used, then detection capability is achieved, but device size and portability are compromised
Solution Approach 1:
The patent combines multiple sensing functions (gas sensing, particle sensing, light emission) and control functions into a single integrated device manufactured using semiconductor processes. The substrate integrates a gas-sensing element, particle-sensing element, light-emitting element, and driving-chip element, eliminating the need for separate conventional sensing devices and achieving miniaturization while maintaining detection capabilities
Solution Approach 2:
The patent replaces conventional mechanical or bulk sensing systems with microelectromechanical elements manufactured using semiconductor fabrication processes. This substitution enables the creation of miniaturized sensors with reduced size while preserving detection functionality through micro-scale structural design and material properties
2Adaptability or versatility
If multiple sensing functions are integrated, then real-time monitoring capability is improved, but device complexity increases
Solution Approach 1:
The patent merges gas sensing, particle sensing, and light emission functions along with their control circuits into a single integrated device. The substrate contains all sensing elements and the driving-chip element that coordinates their operation, enabling real-time multi-parameter air quality monitoring while reducing the complexity that would arise from coordinating multiple separate devices
Solution Approach 2:
The integrated device performs multiple functions simultaneously: detecting hazardous gases, detecting suspended particles, and providing real-time monitoring. The driving-chip element controls all sensing operations through a unified system, making the device versatile for comprehensive air quality assessment while managing complexity through integrated control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device provides real-time monitoring of air quality and hazardous gas detection, facilitating immediate alerts and preventing health hazards by integrating miniaturized semiconductor-manufactured components for portable and small device applications.
Implementation Method 1
The light-emitting element manufactured by a semiconductor process is stacked and integrally formed on the particle-sensing region of the substrate to emit a light beam
Implementation Method 2
receive scattered light spots generated by the light beam of the light-emitting element irradiating on the suspended particles
Data Source
AI summary
A gas detection device manufactured by a semiconductor process includes a substrate, a microelectromechanical element, a light-emitting element, a particle-sensing element, a gas-sensing element, a driving-chip element and an encapsulation layer. The driving-chip element controls driving operations of the microelectromechanical element, the light-emitting element, the particle-sensing element and the gas-sensing element, respectively. When the microelectromechanical element is enabled to actuate transportation of gas, the gas is introduced into the gas detection device through an inlet aperture of the substrate. Scattered light spots generated by the light beam of the light-emitting element irradiating on suspended particles contained in the gas are received by the particle-sensing element to generate a detection datum of the suspended particles. The gas-sensing element detects the gas passing through and generates a detection datum of hazardous gas contained in the gas. Finally, the gas is discharged from an outlet aperture of the encapsulation layer.