Semiconductor Gate Terminal Conduction via Ceramic-Embedded Metal Protrusion

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Solution Overview

Problem

Power modules face challenges in ensuring reliable electrical conductivity between semiconductor chips and circuits, particularly for gate terminals with smaller areas, and in achieving effective heat dissipation due to the lower thermal conductivity of ceramic control signal circuits compared to metal circuits.

Innovation Solution

A semiconductor device with a wire layer within a ceramic layer and a metal layer that connects non-gate terminals, where the gate terminal is electrically connected to the wire layer via a conductive protrusion extending beyond the metal layer, ensuring conductivity and heat dissipation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a ceramic layer is used for the control signal circuit, then insulation performance is improved, but thermal conductivity deteriorates

Engineering Contradiction:
Improveinsulation performanceVSAvoidthermal conductivity
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The patent uses a composite structure combining ceramic layer for insulation and metal protrusion for thermal conduction. The ceramic layer provides electrical insulation while the metal protrusion embedded within it provides a thermal conduction path, creating a composite material system that simultaneously achieves both insulation and heat dissipation functions.

Inventive Principle:
Principle #40Composite materials

2Volume of moving object

If the gate terminal area is reduced, then device miniaturization is achieved, but alignment precision deteriorates

Engineering Contradiction:
Improvegate terminal areaVSAvoidalignment precision
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The metal protrusion acts as an intermediary element between the gate terminal and the wire layer. It extends the connection point vertically, creating a larger effective bonding area that compensates for the reduced gate terminal area, thereby improving alignment tolerance and bonding reliability despite miniaturization.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If the connection portion is extended toward the semiconductor switching element, then electrical conductivity is improved, but thermal deformation risk increases

Engineering Contradiction:
Improveelectrical conductivityVSAvoidthermal deformation
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The metal protrusion is embedded within the ceramic layer, creating a nested structure where the metal connection element is contained within the insulating ceramic matrix. This nesting provides mechanical support and thermal stability from the ceramic while the metal core maintains electrical conductivity, reducing thermal deformation risk.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration ensures reliable electrical conductivity between the gate terminal and the wire layer while enhancing heat dissipation, achieving both high reliability and efficient heat management.

Implementation Method 1

the gate terminal of the semiconductor switching element and the wire layer are electrically connected with each other via a connection portion formed of conductive material

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

the connection portion is protruded more than the metal layer toward the semiconductor switching element... capable of ensuring heat dissipation

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP3690938B1Semiconductor device and production method therefor
Publication Date: 2022.09.07 PROTERIAL LTD
  • EP3690938B1 patent drawingFigure 1
  • EP3690938B1 patent drawingFigure 2
  • EP3690938B1 patent drawingFigure 3

AI summary

The objective of the present invention is to provide a technique that ensures conduction between a gate terminal of a semiconductor switching element and a wiring layer in a semiconductor device formed with a wiring layer inside a ceramic layer. This semiconductor device comprises: a wiring layer that is inside a ceramic layer formed above an insulation layer; and a metal layer for connecting terminals from the semiconductor switching element other than the gate terminal. The wiring layer and the gate terminal from the semiconductor switching element are connected electrically via a connection part formed from a conductive material. The connection part protrudes more than the metal layer toward the semiconductor switching element