Semiconductor Gate Pad Oscillation Suppression

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Solution Overview

Problem

Conventional semiconductor devices require external connection of capacitance and resistance between the gate and drain to suppress gate oscillation phenomena during switching off, which increases the number of discrete parts and complexity.

Innovation Solution

A semiconductor device with a gate pad part featuring a conductor layer and a gate oscillation suppressing structure where impurity diffusion regions of a second conductive type are alternately formed with impurity non-diffusion regions on the surface of the drift layer, eliminating the need for external capacitance and resistance connections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If external capacitance and resistance are connected between gate and drain to suppress gate oscillation, then gate oscillation is suppressed, but the number of discrete parts and connection complexity increases

Engineering Contradiction:
Improvegate oscillation suppressionVSAvoidnumber of discrete parts and connections
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the gate oscillation suppression function into the semiconductor device structure itself by forming an impurity diffusion region in the drift layer. This integrates the suppression mechanism (analogous to external R-C circuit) directly into the device, eliminating the need for separate discrete capacitors and resistors while maintaining the oscillation suppression effect

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The semiconductor device uses its own internal structure (impurity diffusion region in drift layer) to suppress gate oscillation, rather than requiring external components. The device structure itself provides the necessary capacitance and resistance characteristics through the doped region, making the system self-sufficient

Inventive Principle:
Principle #25Self-service

2Strength

If p region is formed over the whole area of gate pad part on drift layer, then breakdown strength is improved, but gate oscillation occurs during switching off

Engineering Contradiction:
Improvebreakdown strengthVSAvoidgate oscillation suppression
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

Instead of forming a p region over the entire gate pad area, the patent applies local doping by forming an impurity diffusion region only in specific areas of the drift layer beneath the gate pad. This localized approach maintains breakdown strength in critical regions while avoiding excessive carrier injection that causes gate oscillation

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances gate-drain capacitance and resistance, effectively suppressing gate oscillation phenomena while maintaining high breakdown strength and reducing reverse recovery period and peak current.

Implementation Method 1

This configuration enhances gate-drain capacitance and resistance, effectively suppressing gate oscillation phenomena

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

This configuration enhances gate-drain capacitance and resistance, effectively suppressing gate oscillation phenomena

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 3

at the time of applying a reverse bias voltage, a depletion layer in the n- drift layer 52 extends toward the n+ drain layer 51 over the whole area of the gate pad part thus providing a semiconductor device having a high breakdown strength

Methodology Applied
Scientific EffectDepletion layer formation: Electric Field

Data Source

PatentUS9960267B2Semiconductor device
Publication Date: 2018.05.01 SHINDENGEN ELECTRIC MANUFACTURING CO LTD
  • US9960267B2 patent drawing
  • US9960267B2 patent drawing
  • US9960267B2 patent drawing

AI summary

In a semiconductor device provided with a MOSFET part and a gate pad part defined on a semiconductor substrate which is formed by laminating a low resistance semiconductor layer and a drift layer, the gate pad part includes: the low resistance semiconductor layer; the drift layer formed on the low resistance semiconductor layer; a poly-silicon layer constituting a conductor layer and a gate pad electrode formed above the drift layer over the whole area of the gate pad part with a field insulation layer interposed therebetween; and a gate oscillation suppressing structure where a p-type diffusion region electrically connected with the a source electrode layer and a p-type impurity non-diffusion region are alternately formed on a surface of the drift layer.