Semiconductor GMI Magnetometer Size Reduction
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Solution Overview
Problem
Current GMI magnetometers are bulky and expensive to manufacture, necessitating a smaller and less expensive alternative.
Innovation Solution
A semiconductor-based GMI magnetometer is developed, incorporating a semiconductor structure with a processing circuit, a magnetic structure with high permeability, and a sense coil formed using metal and non-conductive layers, reducing size and cost through semiconductor processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional GMI magnetometer design is used, then sensitivity is maintained, but size and manufacturing cost increase
Solution Approach 1:
The patent combines the soft ferromagnetic structure, sense coil, and processing circuit into a single integrated semiconductor device. The soft ferromagnetic structure and sense coil are formed on the same semiconductor substrate using sequential deposition and patterning processes, eliminating the need for separate components and reducing overall device size while maintaining the GMI sensing functionality.
Solution Approach 2:
The sense coil is configured to wrap around or enclose the soft ferromagnetic structure in a nested arrangement. This nesting allows the sense coil to be positioned in close proximity to the ferromagnetic structure, maximizing magnetic coupling and sensing sensitivity while minimizing the lateral footprint of the device.
2Measurement precision
If traditional GMI magnetometer design is used, then sensitivity is maintained, but manufacturing cost increases
Solution Approach 1:
The patent combines the soft ferromagnetic structure, sense coil, and processing circuit into a single integrated semiconductor device. The soft ferromagnetic structure and sense coil are formed on the same semiconductor substrate using sequential deposition and patterning processes, eliminating the need for separate components and reducing overall device size while maintaining the GMI sensing functionality.
Solution Approach 2:
The patent uses sputtering deposition to form the soft ferromagnetic structure with controlled thickness (e.g., 1-10 micrometers) and specific magnetic properties. By controlling deposition parameters such as power, pressure, and composition ratios, the manufacturing process achieves consistent magnetic performance across batches, reducing variability and rework costs.
3Measurement precision
If soft ferromagnetic structure with high permeability is used, then impedance change increases, but device complexity increases
Solution Approach 1:
The patent uses sputtering deposition to form the soft ferromagnetic structure with controlled thickness (e.g., 1-10 micrometers) and specific magnetic properties. By controlling deposition parameters such as power, pressure, and composition ratios, the manufacturing process achieves consistent magnetic performance across batches, reducing variability and rework costs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The semiconductor GMI magnetometer achieves a significant reduction in size and cost while maintaining sensitivity, allowing for multiple sensors to be connected in parallel for enhanced performance.
Implementation Method 1
The alternating current passing through soft ferromagnetic structure 110 generates an alternating magnetic field, which changes in response to changes in the impedance of soft ferromagnetic structure 110
Implementation Method 2
The alternating magnetic field induces an alternating current and an alternating voltage in sense coil 114 that tracks the alternating current passing through soft ferromagnetic structure 110
Data Source
AI summary
A giant magneto-impedance (GMI) magnetometer is formed in a semiconductor wafer fabrication sequence, which significantly reduces the size and cost of the GMI magnetometer. The semiconductor wafer fabrication sequence forms a magnetic conductor, a non-magnetic conductor that is wrapped around the magnetic conductor as a coil, and non-magnetic conductors that touch the opposite ends of the magnetic conductor.