Semiconductor Device Handler for Electronic and Optical Testing

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Solution Overview

Problem

Existing semiconductor device testing apparatuses cannot effectively test semiconductor devices with both electronic and optical circuits due to the lack of capability to handle optical signals.

Innovation Solution

A semiconductor device handling apparatus that includes a holding portion with a second transmission portion to transmit optical signals between the optical connection portion of the device under test and a tester, enabling simultaneous testing of electronic and optical circuits.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If an existing electronic component testing apparatus is used, then electrical characteristics of the DUT can be tested, but semiconductor devices with optical circuits cannot be tested

Engineering Contradiction:
Improvetesting capabilityVSAvoidapparatus structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The holding portion is designed to perform multiple functions: holding the DUT, transmitting optical signals, and enabling both electrical and optical testing through a single integrated structure, making the apparatus capable of testing both electronic and photonic components

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The holding portion acts as an intermediary between the DUT and the tester, providing the optical transmission function that bridges the gap between the electrical tester and the optical circuit of the DUT

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the testing of semiconductor devices with both electronic and optical circuits by facilitating the transmission of optical signals between the DUT and the tester, thereby expanding the testing capabilities of existing apparatuses.

Implementation Method 1

a second transmission portion (holder transmitter) transmitting a signal between an optical connection portion disposed on the second surface of the DUT and a first transmission portion (tester transmitter) of the tester

Methodology Applied
Scientific EffectOptical signal transmission: Light

Data Source

PatentUS20250216443A1Semiconductor device handling apparatus and semiconductor device testing apparatus
Publication Date: 2025.07.03 ADVANTEST CORP
  • US20250216443A1 patent drawing
  • US20250216443A1 patent drawing
  • US20250216443A1 patent drawing

AI summary

A semiconductor device handling apparatus handles a device under test (DUT) to bring a terminal disposed on a first surface of the DUT into contact with a contact portion of a tester comprising a tester transmitter. The semiconductor device handling apparatus includes a holder that holds a second surface of the DUT. The holder includes a holder transmitter that transmits a signal between an optical connection portion disposed on the second surface of the DUT and the tester transmitter. The holder transmitter inputs and outputs an optical signal to and from the optical connection portion.