Semiconductor Heat Conductor Layout for Interconnect Heat Protection

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Solution Overview

Problem

Semiconductor arrangements face heat-related performance issues due to heat-generating components, which can cause damage to interconnect arrangements lacking effective heat dissipation mechanisms.

Innovation Solution

A semiconductor arrangement is designed with a heat conductor coupled to a heat sink via a thermally conductive bonding layer, where the heat conductor directs heat away from the interconnect arrangement to the heat sink, reducing heat exposure and potential damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If heat-generating components are included in semiconductor arrangements, then functional performance is improved, but heat damage to interconnect arrangements occurs

Engineering Contradiction:
Improvefunctional performanceVSAvoidheat damage to interconnect
Core Design Contradiction:
PowerVSObject-affected harmful factors

Solution Approach 1:

The patent extracts the heat dissipation function from the interconnect arrangement by introducing a separate heat sink structure. The heat sink is coupled to the interconnect arrangement through a thermally conductive material, allowing heat to be removed from the interconnect region without modifying the interconnect structure itself, thereby preventing heat damage while maintaining power functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces a thermally conductive material as an intermediary between the heat-generating interconnect arrangement and the heat sink. This intermediary material facilitates efficient heat transfer from the interconnect region to the heat sink, enabling the heat sink to protect the interconnect arrangement from heat damage while maintaining functional performance.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If heat dissipation structures are added to semiconductor arrangements, then heat damage is reduced, but device complexity increases

Engineering Contradiction:
Improveheat damage protectionVSAvoidstructural complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The heat sink structure is designed to serve multiple functions: it acts as a thermal management component for heat dissipation, provides mechanical support for the semiconductor device, and can serve as an electrical ground reference. By combining multiple functions into a single structure, the patent reduces device complexity while maintaining effective heat damage protection.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the heat dissipation function with existing structural elements of the semiconductor device. The heat sink is integrated with the substrate or carrier structure, combining thermal management with the mechanical support function already provided by these elements, thereby minimizing the increase in device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces heat exposure to the interconnect arrangement, minimizing the risk of heat damage and improving the performance and reliability of semiconductor devices by efficient heat dissipation.

Implementation Method 1

Heat from the heat source conducts in the direction of the heat sink by way of the heat conductor and the thermally conductive material

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a thermally conductive material of a bonding layer over the heat conductor

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

a heat sink over the thermally conductive material of a bonding layer

Methodology Applied
Scientific EffectHeat sink: Heat Sink

Data Source

PatentUS20240387316A1Semiconductor arrangement and method of forming
Publication Date: 2024.11.21 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240387316A1 patent drawing
  • US20240387316A1 patent drawing
  • US20240387316A1 patent drawing

AI summary

A semiconductor arrangement includes a heat source above an interconnect layer and below a heat conductor. The heat conductor is coupled to a heat sink by a thermally conductive bonding layer. Heat from the heat source is conducted through the heat conductor in a direction opposite the direction of the interconnect layer, through the thermally conductive bonding layer, and to a heat sink. The heat conductor includes an arrangement of dielectric layers, dummy metal layers, and dummy VIA layers.