Semiconductor Heat Sink Layout for Devices of Uneven Heights

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Solution Overview

Problem

Conventional semiconductor apparatuses face challenges in implementing a heat dissipation design suitable for semiconductor devices of varying heights, as existing methods require processing of heat dissipation fins to match each device's height, making it difficult to efficiently cool devices with different heat generation properties.

Innovation Solution

A semiconductor apparatus and manufacturing method that utilize resin heat dissipation materials and heat dissipation fins, where the resin materials are thermally coupled to semiconductor devices of different heights, allowing for adjustable heat dissipation paths through adjustable buffer materials, enabling efficient heat dissipation without the need for extensive fin processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If heat dissipation fin is processed to match the height of each semiconductor device, then heat dissipation efficiency is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improveheat dissipation efficiencyVSAvoidprocessing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The heat dissipation system is segmented into multiple independent heat dissipation fins, each configured to contact semiconductor devices of different heights. This allows each fin to be optimized for specific device heights without requiring complex processing of a single fin structure, thereby resolving the contradiction between heat dissipation efficiency and processing complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different heat dissipation fins are designed with different properties (height, shape, thermal conductivity) to match the local requirements of semiconductor devices with different heights and heat generation properties. This localized optimization enables efficient heat dissipation for each device type without requiring complex processing of a universal fin structure.

Inventive Principle:
Principle #3Local quality

2Reliability

If heat dissipation fin is processed for each semiconductor device, then heat dissipation performance is improved, but manufacturing time and cost increase

Engineering Contradiction:
Improveheat dissipation performanceVSAvoidmanufacturing efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The heat dissipation fins are designed with universal applicability to accommodate multiple types of semiconductor devices with different heights. By creating a family of standardized fin configurations rather than custom-processing fins for each device, the system achieves both good heat dissipation performance and manufacturing efficiency.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

Heat dissipation fins are pre-configured with specific heights and properties before assembly with semiconductor devices. This preliminary preparation allows for standardized manufacturing processes and simplifies the final assembly, improving overall manufacturing efficiency while maintaining optimal heat dissipation performance.

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If semiconductor devices of different heights are mounted on the same substrate, then device integration is improved, but heat dissipation design becomes difficult

Engineering Contradiction:
Improvedevice integrationVSAvoidheat dissipation design complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The heat dissipation fin parameters (height, thickness, shape, material properties) are varied to match the different heights and heat generation properties of semiconductor devices. This parameter optimization allows efficient heat dissipation for integrated devices of varying heights without requiring complex heat dissipation structures.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for a tailored heat dissipation design for semiconductor devices of varying heights, enhancing cooling efficiency and simplifying manufacturing by reducing the complexity of processing heat dissipation fins, while maintaining high heat dissipation performance.

Implementation Method 1

a first resin heat dissipation material having one surface facing a surface of each of the semiconductor devices and a heat dissipation fin to be thermally coupled to the first resin heat dissipation material

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

a heat dissipation fin to be thermally coupled to the first resin heat dissipation material on a surface of the first resin heat dissipation material opposite to the surface facing the semiconductor devices

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 3

a heat dissipation fin to be thermally coupled to the first resin heat dissipation material

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Data Source

PatentUS20230411240A1Semiconductor apparatus and method for manufacturing the semiconductor apparatus
Publication Date: 2023.12.21 MITSUBISHI ELECTRIC CORP
  • US20230411240A1 patent drawing
  • US20230411240A1 patent drawing
  • US20230411240A1 patent drawing

AI summary

A semiconductor manufacturing apparatus according to the present disclosure is configured such that a first resin heat dissipation material directly or indirectly contacts a heat dissipation surface of a semiconductor device having a low heat dissipation property. The first resin heat dissipation material has an opening that exposes a heat dissipation fin above a heat dissipation surface of a semiconductor device other than the semiconductor device that directly or indirectly contacts the first resin heat dissipation material. The heat dissipation fin is configured to pass through the opening of the first resin heat dissipation material and directly or indirectly contact the heat dissipation surface of the semiconductor device other than the semiconductor device that directly or indirectly contacts the first resin heat dissipation material.