Semiconductor Device Heat Source Recess for Temperature Sensing

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Solution Overview

Problem

In miniaturized semiconductor devices, the close arrangement of heat source and temperature sensing elements does not provide sufficient thermal protection due to increased heat generation density and reduced size, leading to inadequate temperature detection precision and efficiency.

Innovation Solution

A semiconductor device design featuring a U-shaped heat source element with a space portion for efficient arrangement of a temperature sensing element, where the distance between the central portion of the temperature sensing element and the coupling region is shorter than the distances to the opposing regions, enhancing heat conduction and temperature detection sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the temperature sensing element is arranged near the heat source element to enhance temperature detection sensitivity, then temperature detection precision is improved, but in miniaturized semiconductor devices with increased heat generation density, the detection precision becomes insufficient

Engineering Contradiction:
Improvetemperature detection precisionVSAvoidheat generation density
Core Design Contradiction:
Measurement precisionVSTemperature

Solution Approach 1:

The heat source element is divided into multiple heat generating regions (first, second, and third regions) with different widths. The temperature sensing element is strategically positioned to detect temperatures from multiple segments, allowing comprehensive monitoring despite miniaturization and high heat density.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the heat source element have different widths to create varied thermal characteristics. The first and second regions have larger widths for higher heat generation, while the third region has a smaller width. The temperature sensing element is positioned to detect temperatures from these locally differentiated regions, improving overall detection precision in miniaturized devices.

Inventive Principle:
Principle #3Local quality

2Volume of moving object

If the semiconductor device is miniaturized to reduce size, then device compactness is improved, but temperature detection efficiency deteriorates due to reduced space for proper element arrangement

Engineering Contradiction:
Improvedevice sizeVSAvoidtemperature detection efficiency
Core Design Contradiction:
Volume of moving objectVSProductivity

Solution Approach 1:

The patent utilizes the width dimension of the heat source element to create multiple heat generating regions with different thermal characteristics. By varying the width along one dimension, the invention achieves effective temperature monitoring in miniaturized devices without requiring increased device volume, thus maintaining compactness while improving detection efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The heat source element features asymmetric width distribution across different regions. The first and second regions have larger widths compared to the third region, creating intentional thermal asymmetry. This asymmetric design allows the temperature sensing element to effectively monitor temperature gradients in a compact configuration, improving detection efficiency without increasing device size.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design improves temperature detection precision and efficiency by optimizing the arrangement of the heat source and temperature sensing elements, ensuring effective thermal protection and monitoring in semiconductor devices.

Implementation Method 1

enhancing heat conduction and temperature detection sensitivity

Methodology Applied
Scientific EffectHeat conduction: Conduction (thermal)

Data Source

PatentEP3089206B1Semiconductor device, and design method for same
Publication Date: 2019.04.17 ROHM CO LTD
  • EP3089206B1 patent drawingFigure 1
  • EP3089206B1 patent drawingFigure 2
  • EP3089206B1 patent drawingFigure 3~4

AI summary

This semiconductor device (10) has a heat source element (HSE) and a thermosensor element (TE) on a semiconductor chip (SCH). The profile of the heat source element (HSE) in plan view is recessed, and the depth (y1) of the recessed space (SP) is set to a size from 0.75 to 0.25 times that of the total length (y0). The center part (Tc) of the thermosensor element (TE) is situated in proximity to one side of a linking area (hse3), and is positioned in the space (SP) in such a way that length (y3) is shorter than length (x31a) and length (x31b). In so doing, heat source element temperature detection sensitivity and efficient positioning of the semiconductor elements can be achieved.