Semiconductor Image Registration Using Periodic Design Features
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Solution Overview
Problem
Current semiconductor examination processes require manual intervention for registering design images with inspection images, which is inefficient and limits the precision of defect detection and process monitoring.
Innovation Solution
A system and method for automatically registering design images with inspection images using periodic distance data and registration algorithms, enabling automatic alignment without user input, even for multi-layer designs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual intervention is used for registering design images with inspection images, then the registration process can be performed with current technology, but the efficiency is low and precision is limited
Solution Approach 1:
The system performs self-registration by automatically determining correspondence between design images and inspection images without requiring manual intervention. The processing circuitry autonomously identifies features, calculates transformations, and aligns the images, making the system self-sufficient in the registration task.
Solution Approach 2:
The patent replaces manual mechanical registration operations with automated computational processing. Instead of manual alignment procedures, the system uses processing circuitry to perform image correlation, feature matching, and transformation calculation, substituting human-operated mechanical processes with automated electronic systems.
2Measurement precision
If manual registration is performed, then the process can be completed with existing tools, but the precision of defect detection is limited
Solution Approach 1:
The system performs preliminary image registration before defect detection, establishing accurate correspondence between design and inspection images in advance. This preliminary alignment ensures that subsequent defect detection operates on properly registered data, improving measurement precision while the automation reduces the time penalty.
Solution Approach 2:
The patent replaces manual registration with automated image processing algorithms that calculate precise transformations between design and inspection images. This substitution enables higher precision alignment through computational methods while reducing the time required compared to manual procedures.
3Productivity
If automated registration is implemented, then efficiency and precision are improved, but the system complexity increases
Solution Approach 1:
The patent introduces processing circuitry as an intermediary between the inspection image and design image, which performs the automated registration functions. This intermediary component handles the complex computations for feature matching and transformation calculation, managing system complexity through dedicated specialized hardware or software modules.
Solution Approach 2:
The registration process is segmented into distinct functional steps: obtaining the inspection image, obtaining design image data, determining correspondence between images, and calculating transformation parameters. This segmentation allows the complex automated registration task to be broken down into manageable processing stages, reducing overall system complexity through modular organization.
Data Source
AI summary
There are provided systems and methods comprising obtaining an inspection image of a semiconductor specimen, and a design image, wherein the design image is informative of design elements, determining data Dpitch informative of a periodic distance between design elements of the design image, which are associated with a shape meeting a similarity criterion, and using the data Dpitch to obtain registration data between the design image and the inspection image.