Semiconductor Inductor With Segmented Conductive Lines
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Solution Overview
Problem
Inductors in semiconductor integrated circuits are prone to variations in impedance due to process variations and packaging structures, leading to deviations from design values.
Innovation Solution
The inductor design features a spiral-like electric current path formed by intersecting first and second conductive lines, with contacts at intersections to create a modifiable inductance, and a ground ring to reduce electrical coupling, allowing for precise control of inductance through layout adjustments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a spiral-like conductive line is formed on a plane to create an inductor, then the inductor can be integrated into semiconductor circuits, but the impedance is highly sensitive to process variations and packaging structures causing deviation from design values
Solution Approach 1:
The inductor is divided into multiple discrete conductive lines arranged in parallel, each contributing to the overall inductance. This segmentation allows the inductance to be distributed across multiple elements, reducing the sensitivity to variations in any single line's dimensions or position, thereby improving impedance control while maintaining integrability.
2Adaptability or versatility
If the inductance is controlled by adjusting the turning number and occupied area of the spiral conductive line, then the inductance value can be modified, but the impedance becomes highly sensitive to process variations
Solution Approach 1:
Different conductive lines are positioned at different locations with different cross-sectional areas, creating local variations in current distribution. This allows the inductance to be controlled by the overall arrangement rather than uniform parameters, making it less sensitive to process variations while maintaining adaptability for inductance modulation.
Solution Approach 2:
The conductive lines are arranged in three-dimensional space with different positions and orientations rather than being confined to a simple planar spiral. This dimensional arrangement provides additional degrees of freedom for controlling inductance while distributing the sensitivity across multiple spatial parameters, improving reliability.
3Measurement precision
If contacts are placed at intersections of conductive lines to form the inductor, then the inductance can be precisely controlled through layout adjustments, but the device complexity increases
Solution Approach 1:
The conductive lines serve multiple functions: they provide both the inductive path and the structural framework for defining the inductance value. The same conductive lines that carry current also define the geometric parameters controlling inductance, eliminating the need for separate control mechanisms and reducing overall device complexity while maintaining precision.
Data Source
AI summary
An inductor includes a plurality of first conductive lines, a plurality of second conductive lines and a plurality of contacts. Each of the first conductive lines is spaced apart from one another. Each of the second conductive lines is spaced apart from one another, and each of the second conductive lines crosses over each of the first conductive lines. Each of the contacts electrically interconnects one of the first conductive lines and one of the second conductive lines. These contacts are arranged in a way such that at least parts of the first conductive lines and at least parts of the second conductive lines form an electric current path serving as an inductor.