Semiconductor Device Minority Charge Carrier Injector Zones

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Solution Overview

Problem

Semiconductor devices experience dynamic avalanche and punch-through effects at high cut-off voltages, leading to destructive avalanche current densities and electromagnetic compatibility issues, particularly above 70 volts, which can damage the device and degrade EMC characteristics.

Innovation Solution

Incorporating minority charge carrier injector zones with complementary conduction between highly doped semiconductor zones and drift zones, allowing for controlled avalanche breakdown and reduced switching losses by adjusting the geometry and doping of these zones to manage electrical field steepening and current densities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a high-resistance pedestal zone with low doping is inserted between drift zone and second highly doped semiconductor zone to avoid current interruption, then the EMC characteristic is improved, but the resistive conducting-state losses increase

Engineering Contradiction:
ImproveEMC characteristicVSAvoidresistive conducting-state losses
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent optimizes the doping concentration and thickness parameters of the pedestal zone to achieve a balance between preventing current interruption and minimizing resistive losses. By carefully selecting specific doping levels and geometric dimensions, the device maintains good EMC characteristics while reducing the negative impact on conducting-state losses.

Inventive Principle:
Principle #35Parameter changes

2Device complexity

If the background doping is increased to avoid flooding of the low-doped region, then the device structure is simplified, but the reverse current breaks off severely during cutting-off

Engineering Contradiction:
Improvedoping structureVSAvoidEMC characteristic
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent employs different doping levels in different regions of the semiconductor device. The pedestal zone has a specific doping concentration that is higher than the drift zone but lower than the highly doped contact zones. This local differentiation allows the device to prevent severe reverse current interruption while maintaining a manageable structural complexity.

Inventive Principle:
Principle #3Local quality

3Productivity

If the drift zone is made thinner to reduce switching losses, then the switching speed is improved, but the dynamic avalanche and punch-through effects become more severe

Engineering Contradiction:
Improveswitching speedVSAvoiddynamic avalanche and punch-through effects
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The pedestal zone acts as an intermediary region between the drift zone and the highly doped semiconductor zone. This intermediate structure helps to gradually transition the electric field distribution, thereby mitigating the severity of dynamic avalanche and punch-through effects even when the drift zone is made thinner for faster switching.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Adaptability or versatility

If control electrodes are added to control body zones for improving device functionality, then the versatility is improved, but the device complexity increases

Engineering Contradiction:
Improvedevice functionalityVSAvoidelectrode structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The control electrodes are designed to perform multiple functions: they control the body zones for device operation, help manage electric field distribution to mitigate avalanche effects, and contribute to overall device performance optimization. This multi-functionality reduces the need for separate dedicated structures for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively reduces the risk of premature breakdowns, improves the ruggedness of semiconductor devices, and maintains EMC characteristics by selectively controlling avalanche and punch-through effects, thereby enhancing the switching performance and reliability of semiconductor devices.

Implementation Method 1

a dynamic avalanche effect or also a dynamic punch-through effect may occur at the main pn junction between body zone and drift zone

Methodology Applied
Scientific EffectAvalanche breakdown: Avalanche Breakdown

Implementation Method 2

In addition, the body zones have minority charge carrier injector zones with complementary conduction to the body zones, arranged between the first semiconductor zones and the drift zone

Methodology Applied
Scientific EffectCharge carrier injection: Injector

Implementation Method 3

control electrodes which are insulated from the semiconductor body by a gate oxide and act on the body zones for controlling the semiconductor device

Methodology Applied
Scientific EffectElectrical insulation: Dielectric

Implementation Method 4

first electrodes which contact first highly doped semiconductor zones and complementary-conduction body zones

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS7923772B2Semiconductor device with a semiconductor body and method for producing it
Publication Date: 2011.04.12 INFINEON TECH AUSTRIA AG
  • US7923772B2 patent drawing
  • US7923772B2 patent drawing
  • US7923772B2 patent drawing

AI summary

A semiconductor device with a semiconductor body and to a method for producing it. In one embodiment, the semiconductor body has first electrodes which contact first highly doped semiconductor zones and complementary-conduction body zones surrounding the first semiconductor zones. The semiconductor body has a second electrode which contacts a second highly doped semiconductor zone. Between the second semiconductor zone and the body zones, a drift zone is arranged. Control electrodes which are insulated from the semiconductor body by a gate oxide and act on the body zones for controlling the semiconductor device are arranged on the semiconductor body. The body zones have minority charge carrier injector zones with complementary conduction to the body zones, arranged between the first semiconductor zones and the drift zone.