Semiconductor Inspection Device Floating Inductance Control
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Solution Overview
Problem
Conventional electrical characteristic inspection devices for semiconductor devices lack a mechanism to adjust floating inductance, which affects surge voltage and current change speed during inspection, making it difficult to create precise measurement conditions without adjusting wiring length or replacing inductors.
Innovation Solution
The device includes a storage unit, control unit, inductive inductance control circuit unit, and floating inductance control circuit unit, allowing the control unit to adjust both inductive and floating inductance based on measurement conditions, eliminating the need for wiring length adjustments and inductor replacements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a circuit for adjusting inductive inductance is provided in the inspection device, then the measurement condition can be created for semiconductor device inspection, but the floating inductance cannot be adjusted, making it difficult to create precise measurement conditions
Solution Approach 1:
The patent applies the Dynamics principle by making the previously fixed floating inductance adjustable. A floating inductance adjustment circuit is introduced that allows dynamic modification of the floating inductance value through switching between different inductance elements, enabling the measurement condition to be optimized without changing the physical wiring structure
Solution Approach 2:
The patent applies the Parameter changes principle by introducing a control mechanism that adjusts the floating inductance parameter. The control circuit selectively connects different inductance elements (Ls1, Ls2, etc.) to change the total floating inductance value, allowing precise control of measurement conditions by varying this key electrical parameter
2Measurement precision
If wiring length adjustment or inductor replacement is performed to create precise measurement conditions, then the measurement precision improves, but the inspection time and operational complexity increase
Solution Approach 1:
The patent eliminates time-consuming manual adjustments by implementing a dynamically adjustable floating inductance circuit. The control unit can switch between different inductance values electronically, replacing the need for physical wiring length adjustments or inductor replacements with rapid electronic switching
Solution Approach 2:
The patent applies the Self-service principle by enabling the inspection device to automatically adjust its own floating inductance parameter through the control circuit. The system can select appropriate inductance values based on inspection requirements without requiring external intervention for wiring modifications
Data Source
AI summary
An object is to provide a technique capable of creating a precise measurement condition in a facilitated manner relating to an electrical characteristic inspection for a semiconductor device. An electrical characteristic inspection device includes a storage unit configured to store a measurement condition of the semiconductor device being an inspection subject, a control unit configured to read out the measurement condition corresponding to inspection contents to be executed from the storage unit, an inductive inductance control circuit unit configured to set inductive inductance for the semiconductor device, and a floating inductance control circuit unit configured to set floating inductance for the semiconductor device. Based on the measurement condition read out from the storage unit, the control unit is configured to adjust the inductive inductance by controlling the inductive inductance control circuit unit, and adjust the floating inductance by controlling the floating inductance control circuit unit.