Semiconductor Inspection Phase Measurement Synchronization
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Solution Overview
Problem
Current optical probing technologies for semiconductor device inspection lack precision in measuring phase information, leading to incomplete identification of failure causes and locations in semiconductor devices.
Innovation Solution
A semiconductor device inspection system that utilizes a light generating unit, test signal application, light detection, and synchronized spectrum analyzers to derive precise phase information of detection signals by measuring phase differences between detection and reference signals, preventing phase and frequency overlap between analyzers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical probing technology is used to inspect semiconductor devices, then failure positions can be specified, but measurement precision of phase information is insufficient
Solution Approach 1:
The patent divides the measurement system into two separate spectrum analyzers: one dedicated to measuring the detection signal's phase information, and another dedicated to measuring the reference signal's phase information. This segmentation allows each analyzer to be optimized for its specific measurement task, thereby improving the overall precision of phase information measurement and enabling more complete failure cause identification.
Solution Approach 2:
The patent introduces a synchronization unit as an intermediary component that coordinates the base signals between the two spectrum analyzers. This synchronization unit ensures that both analyzers operate with synchronized base signals, preventing phase difference overlapping and enabling accurate derivation of the detection signal's phase information at the frequency of interest.
2Measurement precision
If multiple spectrum analyzers are used to measure phase information, then measurement precision improves, but device complexity increases
Solution Approach 1:
The patent combines the functionality of multiple spectrum analyzers through a synchronization unit that coordinates their operations. By merging the control and synchronization functions, the system achieves high measurement precision without proportionally increasing complexity. The synchronized operation of multiple analyzers allows precise phase information derivation while maintaining manageable system complexity through unified control.
Solution Approach 2:
The synchronization unit serves multiple functions: it generates base signals for both spectrum analyzers, synchronizes their operations, and coordinates the measurement processes. This multi-functionality reduces the need for separate control mechanisms for each analyzer, thereby improving measurement precision while limiting the increase in overall device complexity.
3Device complexity
If phase information is measured without synchronization, then device complexity is reduced, but measurement precision deteriorates due to overlapping phase differences
Solution Approach 1:
The synchronization unit performs preliminary synchronization of the base signals before the spectrum analyzers conduct their phase information measurements. By pre-synchronizing the base signals, the system prevents phase difference overlapping during the measurement process, ensuring accurate phase information derivation without requiring complex post-processing or additional measurement mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise inspection of semiconductor devices by accurately measuring phase information at specific frequencies, enhancing the ability to identify failure causes and locations within semiconductor devices.
Implementation Method 1
a light detection unit for detecting the light reflected by the semiconductor device and outputting a detection signal when the light is irradiated to the semiconductor device
Implementation Method 2
a first spectrum analyzer, to which the detection signal is input, for measuring first phase information serving as phase information of the detection signal
Implementation Method 3
a second spectrum analyzer, to which the reference signal is input, for measuring second phase information serving as phase information of the reference signal
Implementation Method 4
an analysis unit for deriving phase information of the detection signal at the predetermined frequency based on the first phase information and the second phase information
Data Source
AI summary
A semiconductor device inspection system includes a laser beam source, a tester, an optical sensor, a first spectrum analyzer for measuring first phase information serving as phase information of the detection signal, a reference signal generating unit for generating a reference signal of a predetermined frequency, a second spectrum analyzer for measuring second phase information serving as phase information of a reference signal, and an analysis unit for deriving phase information of the detection signal at the predetermined frequency, wherein the first spectrum analyzer measures the first phase information with respect to the reference frequency, the second spectrum analyzer measures the second phase information with respect to the reference frequency, and the frequency of the base signal of the first spectrum analyzer and the phase thereof are synchronized with the frequency of the base signal of the second spectrum analyzer and the phase thereof.