Semiconductor Device Insulating Film Mold Layer Protection

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Solution Overview

Problem

Existing semiconductor devices face reliability issues due to degradation of insulating films under high temperature and humidity conditions, leading to moisture ingress and ion migration, which can cause malfunctions.

Innovation Solution

A semiconductor device design that includes a semiconductor layer with a first and second main surface, a first and second electrode layer, an insulating film covering the end portion of the first electrode layer, a plating layer covering at least a portion of the first electrode layer other than the end portion, and a mold layer covering the insulating film, which enhances the reliability by suppressing degradation of the insulating film.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an insulating film is used to cover the end portion of the electrode layer, then electrical insulation is achieved, but the insulating film degrades under high temperature and humidity conditions leading to reliability issues

Engineering Contradiction:
Improvedevice reliabilityVSAvoidinsulating film stability
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent uses a composite structure consisting of an insulating film layer and a mold layer. The insulating film (such as silicon oxide or silicon nitride) provides electrical insulation, while the mold layer (resin material) provides environmental protection. This composite material approach allows each layer to perform its specific function optimally, preventing the insulating film from degrading under high temperature and humidity while maintaining electrical insulation properties.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The mold layer acts as an intermediary protective barrier between the insulating film and the harsh external environment. This intermediary layer prevents direct exposure of the insulating film to high temperature and humidity, thereby preventing degradation and maintaining long-term reliability of the semiconductor device.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If the insulating film is exposed to the environment, then manufacturing is simpler, but moisture ingress and ion migration occur causing malfunctions

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoiddevice reliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent employs a composite structure with two distinct layers: an insulating film for electrical insulation and a mold layer for environmental protection. This composite approach maintains manufacturing simplicity while adding the necessary protective function, as the mold layer can be applied as a final encapsulation step that seals the insulating film from environmental exposure.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The mold layer functions as a flexible protective shell that encapsulates the insulating film and electrode structures. This thin film layer provides comprehensive protection against moisture ingress and ion migration while allowing the underlying electrical structures to function normally, thus preventing malfunctions without complicating the manufacturing process.

Inventive Principle:
Principle #30Flexible shells and thin films

Data Source

PatentUS20230136019A1Semiconductor device
Publication Date: 2023.05.04 ROHM CO LTD
  • US20230136019A1 patent drawing
  • US20230136019A1 patent drawing
  • US20230136019A1 patent drawing

AI summary

A semiconductor device includes a semiconductor layer that has a main surface, a main surface electrode that is arranged at the main surface, an insulating film that partially covers the main surface electrode such as to expose a portion of the main surface electrode, a mold layer that covers the insulating film such as to expose the main surface electrode, and a pad electrode that is arranged on the main surface electrode such as to be electrically connected to the main surface electrode.