Semiconductor Package Interlocked Connection Delamination

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Solution Overview

Problem

Semiconductor packages face delamination issues due to thermal expansion coefficient mismatches between materials, leading to humidity and contaminant ingress and catastrophic failures, especially at lower temperatures, with conventional solutions being ineffective in expanding the operating temperature range.

Innovation Solution

The introduction of protrusions on the support substrate or block that extend into the encapsulation material, forming an interlocked connection to increase the tensile strength of the interface, strategically placed at delamination weak points to prevent separation and enhance the package's temperature range operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional solutions (roughening surface or using adhesion promoter) are used to address delamination, then package cost increases, but the operating temperature range is not meaningfully increased especially towards lower temperatures

Engineering Contradiction:
Improvedelamination resistanceVSAvoidpackage cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The support substrate side is segmented into multiple protrusions that extend into the encapsulation material. This segmentation creates multiple interlocked connection points distributed across the interface, preventing delamination more effectively than a single continuous surface treatment while avoiding the cost of adhesion promoters or surface roughening processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The solution transitions from a two-dimensional surface treatment (roughening or adhesion promoter coating) to a three-dimensional interlocked structure. The protrusions extend into the encapsulation material, creating mechanical interlocking in the depth dimension that significantly enhances delamination resistance without increasing manufacturing complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Temperature

If conventional solutions are used to address delamination, then manufacturing process is simplified, but the package cannot operate reliably at lower temperatures due to delamination

Engineering Contradiction:
Improveoperating temperature rangeVSAvoiddelamination resistance at low temperature
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The protrusions are designed with specific geometric parameters (height, width, spacing, and profile shape) that optimize their ability to resist delamination forces at low temperatures. By carefully controlling these parameters, the interlocked connection maintains package integrity across an extended temperature range from -40°C to 125°C and beyond.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The interface between the support substrate and encapsulation material creates a composite structure with enhanced mechanical properties. The combination of the rigid support substrate protrusions and the encapsulation material forms an interlocked composite that resists thermal stress and delamination forces better than either material alone.

Inventive Principle:
Principle #40Composite materials

3Device complexity

If no protrusions are used, then the package structure is simple, but delamination occurs at the interface between encapsulation material and support substrate at lower temperatures

Engineering Contradiction:
Improvepackage structure complexityVSAvoidinterface integrity
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The support substrate side is segmented into multiple protrusions that extend into the encapsulation material. This segmentation creates multiple interlocked connection points distributed across the interface, preventing delamination more effectively than a single continuous surface treatment while avoiding the cost of adhesion promoters or surface roughening processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The solution transitions from a two-dimensional surface treatment (roughening or adhesion promoter coating) to a three-dimensional interlocked structure. The protrusions extend into the encapsulation material, creating mechanical interlocking in the depth dimension that significantly enhances delamination resistance without increasing manufacturing complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The interlocked connections effectively prevent delamination, maintaining the integrity of the semiconductor package interfaces at lower temperatures, thereby preventing failures and allowing operation within a wider temperature range without delamination-type failures.

Implementation Method 1

A protrusion extends outward from a side of the support substrate and terminates in the encapsulation material. The protrusion forms an interlocked connection with the encapsulation material.

Methodology Applied
Scientific EffectInterlocked connection: Mechanical Fastener

Implementation Method 2

The interlocked connection increases the tensile strength of the interface between the encapsulation material and the side of the support substrate with the protrusion.

Methodology Applied
Scientific EffectTensile strength enhancement: Mechanical Force

Data Source

PatentUS10090216B2Semiconductor package with interlocked connection
Publication Date: 2018.10.02 INFINEON TECHNOLOGIES AG
  • US10090216B2 patent drawing
  • US10090216B2 patent drawing
  • US10090216B2 patent drawing

AI summary

A semiconductor package includes a block having opposing first and second main surfaces and sides between the first and second main surfaces, and an encapsulation material at least partly covering the block. One or both of the main surfaces of the block has recessed regions. The recessed regions do not extend completely through the block from one main surface to the other main surface. The encapsulation material fills the recessed regions to form an interlocked connection between the block and the encapsulation material. Additional semiconductor package embodiments are provided.