Semiconductor Laser Block Layer Design for Leakage Current Reduction

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Solution Overview

Problem

Current semiconductor lasers for optical fiber communication technology have limitations in terms of structure and manufacturing methods, which affect their performance, particularly in reducing leakage current and improving modulation characteristics.

Innovation Solution

A semiconductor laser design featuring a mesa-type semiconductor part with a block layer comprising a p-type block layer, a high-resistance layer, and an n-type block layer, which reduces capacitance and leakage current, and a manufacturing method that includes forming these layers over a p-type semiconductor substrate using MOVPE techniques to enhance the laser's performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional block layer structure is used in semiconductor laser, then the manufacturing process is simple, but the leakage current is high and modulation characteristics are poor

Engineering Contradiction:
Improveleakage current reductionVSAvoidblock layer structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The block layer is divided into three distinct segments: p-type block layer, high-resistance layer, and n-type block layer. Each segment performs a specific function in suppressing leakage current while maintaining low capacitance, thereby resolving the contradiction between reliability improvement and device complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the block layer are assigned different electrical properties (p-type, high-resistance, n-type) to optimize local functions. The p-type region suppresses one type of leakage, the high-resistance region blocks carrier injection, and the n-type region provides electrical contact, achieving superior overall performance

Inventive Principle:
Principle #3Local quality

2Speed

If the block layer capacitance is reduced for better high-speed modulation, then the modulation characteristics improve, but the leakage current suppression becomes more difficult

Engineering Contradiction:
Improvemodulation speedVSAvoidleakage current
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The block layer is segmented into multiple functional regions that independently address capacitance and leakage current issues. The thin structure (50-200 nm total thickness) reduces capacitance for high-speed modulation, while the multi-layer configuration (p-type, high-resistance, n-type) provides effective leakage current suppression pathways

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The high-resistance layer acts as an intermediary between the p-type and n-type block layers, providing a barrier that suppresses carrier injection and leakage current while maintaining the overall low-capacitance structure necessary for high-speed modulation

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If a multi-layer block layer structure is formed, then the laser performance improves, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvelaser performanceVSAvoidlayer formation precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The MOVPE process parameters are optimized so that each layer forms with self-regulating characteristics. The sequential deposition of p-type, high-resistance, and n-type layers allows each to form with controlled thickness and properties, reducing the need for post-manufacturing adjustments and improving yield

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution results in a semiconductor laser with improved high-speed modulation characteristics, reduced leakage current, and increased manufacturing yield, achieving lower threshold values and better optical output.

Implementation Method 1

a first resistive layer formed over the p-type block layer and having a resistance larger than that of the p-type block layer

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Data Source

PatentUS9979159B2Semiconductor laser and manufacturing method thereof
Publication Date: 2018.05.22 RENESAS ELECTRONICS CORP
  • US9979159B2 patent drawing
  • US9979159B2 patent drawing
  • US9979159B2 patent drawing

AI summary

In a semiconductor laser, a block layer is provided on both sides of a mesa-type semiconductor part having an n-type cladding layer, an active layer, and a p-type cladding layer. The block layer has: a p-type block layer formed on the side surface of the mesa-type semiconductor part and over a p-type semiconductor substrate; a high-resistance layer formed over the p-type block layer; and an n-type block layer formed over the high-resistance layer, which has a higher resistance than that of the p-type block layer. By providing the high-resistance layer between the p-type block layer and the n-type block layer, the thickness of the p-type block layer can be controlled and a leakage current (flow of a hole) can be reduced. Further, the distance between the n-type cladding layer and the n-type block layer can be secured, and hence a leakage current (flow of an electron) can be prevented.