Semiconductor Die Embedding With Laser-Structured Conductive Passageways

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current semiconductor device manufacturing, particularly for QFN packages, faces limitations in reducing wiring, enhancing current distribution flexibility, integrating passive components, improving transistor performance, and reducing mechanical stress, while also dealing with the unavailability of the top surface of the semiconductor die for connection and the complexity of wire bonding layouts.

Innovation Solution

The implementation of electrically-conductive passageways and lines within the packaging material, created using laser direct structuring technology, which allows for the elimination of wire bonding and the integration of passive components, while maintaining flexibility in signal and current distribution, and reducing mechanical stress by providing alternative pathways for electrical connections and thermal dissipation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If wire bonding is used to provide electrical connections in QFN packages, then electrical connectivity is achieved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improveelectrical connectivityVSAvoidwire bonding layout complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts the wire bonding step from the manufacturing process by providing pre-formed electrical connection means (leads or trace patterns) on the support substrate that directly connect to the semiconductor die, eliminating the need for separate wire bonding operations and reducing layout complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The electrical connection means are prepared in advance on the support substrate with predetermined connection patterns, allowing direct attachment of the semiconductor die without requiring complex wire bonding layouts to be designed and executed during assembly

Inventive Principle:
Principle #10Preliminary action

2Adaptability or versatility

If the top surface of the semiconductor die is used for connections, then connection options are limited, but using alternative approaches increases manufacturing flexibility

Engineering Contradiction:
Improveconnection flexibilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent moves electrical connections from the traditional top-surface approach to alternative dimensions by providing connection means on the support substrate that connect to the bottom surface or side surfaces of the semiconductor die, enabling greater flexibility in connection routing and passive component integration

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The support substrate is divided into functional regions including electrical connection means, passive component mounting areas, and thermal dissipation zones, allowing independent optimization of each function without interfering with the others

Inventive Principle:
Principle #1Segmentation

3Adaptability or versatility

If wiring is reduced in QFN packages, then current distribution flexibility improves, but alternative current pathways must be provided

Engineering Contradiction:
Improvecurrent distribution flexibilityVSAvoidcurrent pathway design
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The support substrate serves multiple functions simultaneously: it provides mechanical support, electrical connections through integrated leads or traces, passive component mounting, and thermal management, eliminating the need for separate wiring layers and simplifying current distribution pathways

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the performance of semiconductor devices by reducing mechanical stress, improving current distribution, and allowing for the integration of passive components within the package, thereby improving the overall efficiency and flexibility of semiconductor device manufacturing.

Implementation Method 1

created using laser direct structuring technology

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Data Source

PatentUS11133242B2Method of manufacturing semiconductor devices, corresponding device and circuit
Publication Date: 2021.09.28 STMICROELECTRONICS SRL
  • US11133242B2 patent drawing
  • US11133242B2 patent drawing
  • US11133242B2 patent drawing

AI summary

A method of manufacturing semiconductor devices such as integrated circuits comprises: providing one or more semiconductor chips having first and second opposed surfaces, coupling the semiconductor chip or chips with a support substrate with the second surface towards the support substrate, embedding the semiconductor chip or chips coupled with the support substrate in electrically-insulating packaging material by providing in the packaging material electrically-conductive passageways. The electrically-conductive passageways comprise: electrically-conductive chip passageways towards the first surface of the at least one semiconductor chip, and/or electrically-conductive substrate passageways towards the support substrate.