Inclined Side Faces in Semiconductor Laser Waveguide

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Solution Overview

Problem

Conventional semiconductor laser devices face challenges in achieving high-power operation with stable multiple transverse mode output due to light leakage from the optical waveguide in the transverse direction, leading to feedback and instability, especially at high current injection levels, which results in reduced yield and reliability.

Innovation Solution

A semiconductor laser device with a stacked structure featuring inclined side faces that reflect and inhibit light leakage from the optical waveguide, allowing for stable multiple transverse mode operation even at increased current injection, by positioning the active layer within the internal reflection distance of the inclined side faces, thereby reducing feedback and enhancing reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If current injection level is increased to achieve high-power operation, then optical output power is improved, but light leakage from optical waveguide increases causing feedback and instability

Engineering Contradiction:
Improveoptical output powerVSAvoidoperational stability
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The patent converts the harmful light leakage from the optical waveguide into a beneficial effect by designing the inclined side faces to reflect this leaked light back into the waveguide core, transforming what would be loss and instability into enhanced light confinement and improved operational stability at high power levels

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent addresses the two-dimensional light leakage problem by introducing a three-dimensional geometric solution through inclined side faces, adding a dimensional aspect to light management that enables reflection and redirection of leaked light back into the guiding structure

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If conventional semiconductor laser structure is used, then manufacturing simplicity is maintained, but light leakage causes feedback and mode instability

Engineering Contradiction:
Improvestructural simplicityVSAvoidmode stability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies the principle of curvature by replacing the conventional flat side faces with inclined surfaces, creating a geometric configuration that actively manages light propagation through reflection, thereby improving mode stability while maintaining compatibility with standard semiconductor fabrication processes

Inventive Principle:
Principle #14Spheroidality (Curvature)

3Area of moving object

If active layer width is increased to support multiple transverse modes, then mode capacity is improved, but light leakage and feedback increase causing instability

Engineering Contradiction:
Improveactive layer widthVSAvoidoutput stability
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The patent changes the geometric parameters of the side faces from flat to inclined, fundamentally altering the light interaction characteristics and enabling stable multiple transverse mode operation by controlling the reflection and confinement of light within the expanded active layer structure

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The semiconductor laser device achieves high-power, long-term reliable operation with reduced optical waveguide losses and increased efficiency, enabling stable multiple transverse mode output at high current levels without the issues of light feedback and leakage.

Implementation Method 1

A pair of side faces as a pair are formed in portions of the stacked structure that ranges from part of the first conductivity-side semiconductor layer to the second conductivity-side semiconductor layer. The pair of side faces in at least part of the first conductivity-side semiconductor layer is inclined to the main surface of the substrate.

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS11437780B2Semiconductor laser device, semiconductor laser module, and welding laser light source system
Publication Date: 2022.09.06 NUVOTON TECH CORP JAPAN
  • US11437780B2 patent drawing
  • US11437780B2 patent drawing
  • US11437780B2 patent drawing

AI summary

A semiconductor laser device lases in a multiple transverse mode and includes a stacked structure where a first conductivity-side semiconductor layer, an active layer, and a second conductivity-side semiconductor layer are stacked above a substrate. The second conductivity-side semiconductor layer includes a current block layer having an opening that delimits a current injection region. Side faces as a pair are formed in portions of the stacked structure that range from part of the first conductivity-side semiconductor layer to the second conductivity-side semiconductor layer. The active layer has a second width greater than a first width of the opening. The side faces in at least part of the first conductivity-side semiconductor layer are inclined to the substrate. A maximum intensity position in a light distribution of light guided in the stacked structure, in a direction of the normal to the substrate, is within the first conductivity-side semiconductor layer.