Semiconductor Inspection Timing Analysis via Laser Triggering
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Solution Overview
Problem
Existing semiconductor device inspection methods can only specify defective points based on the presence or absence of a change in state due to laser irradiation, limiting the ability to perform comprehensive analyses.
Innovation Solution
A semiconductor device inspection method and apparatus that involves inputting a signal to the device, irradiating it with light, and deriving time information from the input to output signal changes, allowing for various analyses by synchronizing light irradiation with a loop trigger signal and generating measurement images to associate light positions with time information.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If only Pass/Fail information is measured based on state change due to laser irradiation, then the inspection process is simple, but various analyses on the semiconductor device cannot be performed
Solution Approach 1:
The patent introduces a time dimension to the inspection process by measuring not only the presence/absence of state changes (Pass/Fail) but also the timing information when state changes occur. This temporal dimension enables various analyses such as waveform analysis, timing analysis, and defect characterization while maintaining a relatively simple inspection setup using laser irradiation and state detection.
2Loss of information
If time information is derived from input signal to result signal, then various analyses can be performed, but the measurement and synchronization become more complex
Solution Approach 1:
The patent employs feedback mechanisms where the measured time information and state changes are fed back into the analysis system. The inspection apparatus uses the derived time information to adjust and refine measurements, enabling accurate timing analysis while managing the complexity through systematic feedback-based measurement and synchronization processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables comprehensive analysis of semiconductor devices by measuring state changes and their timing, enhancing the ability to identify defects and perform detailed inspections.
Implementation Method 1
a semiconductor device is irradiated with a laser beam of less than 1064 nm having energy larger than the bandgap of silicon. Pass/Fail information of a semiconductor device changing due to a photo-electromotive current caused by this irradiation is measured.
Data Source
AI summary
An inspection method for inspecting a semiconductor device which is an object to be inspected includes a step of inputting an input signal to the semiconductor device, a step of irradiating the semiconductor device with light, a step of outputting a result signal indicating a change in a state of the semiconductor device based on an output signal which is output from the semiconductor device to which the input signal is input while the semiconductor device is irradiated with the light, and a step of deriving time information relating to a time from the input of the input signal to the semiconductor device to the output of the result signal.