Automated Loading Sequence Verification for Semiconductor Boats
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Solution Overview
Problem
Manual loading sequence calculations in semiconductor manufacturing processes are prone to errors, and existing double confirm mechanisms only verify batch consistency without ensuring the accuracy of the loading sequence for boats and batches.
Innovation Solution
An automated method calculates the loading sequence using algorithm logic, determining runnable boat positions and comparing the actual sequence with the calculated one to prevent errors, ensuring correct boat positions for loaded materials through a confirmation mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If operators manually calculate loading sequence, then flexibility in operation is maintained, but errors occur due to manual calculation
Solution Approach 1:
The system performs self-service by automatically calculating the loading sequence based on input parameters without requiring manual intervention. The computer autonomously determines the correct sequence, reducing human error while maintaining operational flexibility through automated adjustments based on process requirements.
Solution Approach 2:
The patent substitutes manual calculation operations with automated computer-based calculations. This replacement maintains operational flexibility through programmable logic while significantly improving loading sequence accuracy by eliminating manual calculation errors.
Data Source
AI summary
A method for automatically checking a sequence of loading boats and batches for a semiconductor manufacturing process is provided. According to a developed logic, a loading sequence is automatically calculated by a system. By comparing the actual loading sequence with the calculated sequence when the boats are entering, it is ensured that no errors occur when loading the boats in the batches. When loading the boats in the batches, operators can truly load the boats in the batches according to the entering sequence together with the current confirmation mechanism, so as to ensure the boat positions for the loaded materials to be correct. The method for automatically checking the sequence of loading boats and batches is further capable of calculating the loading sequence through the developed logic by automatically determining runnable boat positions for the material after recording a parameter for detecting a previous boat by the system.