Real-Time Semiconductor Material Scheduling via Dynamic Rule Traversal

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Solution Overview

Problem

Current semiconductor fabrication methods face challenges in accurately scheduling material pieces in real-time, leading to inefficiencies and bottlenecks due to differences in material transportation and processing times, which affect fabrication efficiency.

Innovation Solution

A method and system that utilize real-time status information to traverse scheduling rules and execute operation instructions dynamically, ensuring optimal material paths and improving computation accuracy by determining whether designated tasks are completed and updating status information accordingly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional scheduling methods are used for material pieces in semiconductor fabrication, then the scheduling process is simple, but the computation accuracy is low and fabrication efficiency is reduced due to inability to adapt to real-time status changes

Engineering Contradiction:
Improvecomputation accuracyVSAvoidscheduling system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The scheduling system dynamically adjusts scheduling rules based on real-time device status information. The system continuously monitors the status of material pieces and device components, and modifies scheduling decisions in real-time to adapt to changing conditions, thereby improving computation accuracy without requiring a completely complex system architecture

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system implements feedback mechanisms by continuously acquiring real-time status information from the device and using this information to adjust scheduling rules. The scheduling system receives feedback about material piece status, device component status, and task completion states, and uses this feedback to optimize scheduling decisions, improving accuracy while maintaining manageable system complexity through iterative refinement

Inventive Principle:
Principle #23Feedback

2Productivity

If real-time status monitoring and dynamic scheduling rule traversal are implemented, then fabrication efficiency is improved, but the system complexity and computational load increase

Engineering Contradiction:
Improvefabrication efficiencyVSAvoidscheduling system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The system performs preliminary actions by pre-defining multiple scheduling rules that cover various device status scenarios. These scheduling rules are prepared in advance and stored in the system, allowing for rapid selection and execution based on real-time status without requiring complex real-time computation, thus improving fabrication efficiency while controlling system complexity

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The scheduling system is segmented into multiple independent scheduling rules, each handling specific device status conditions. This segmentation allows the system to process scheduling decisions in a modular fashion, traversing through predefined rules rather than performing complex holistic optimization, thereby improving fabrication efficiency while keeping the computational load manageable through divided responsibilities

Inventive Principle:
Principle #1Segmentation

3Manufacturing precision

If scheduling rules are traversed for each material piece based on real-time status, then the material path optimization is improved, but the computation time and processing overhead increase

Engineering Contradiction:
Improvematerial path optimizationVSAvoidcomputation time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The system applies partial action by traversing only the necessary subset of scheduling rules relevant to the current device status and material piece requirements, rather than exhaustively evaluating all possible scheduling rules. This selective traversal approach optimizes material paths effectively while minimizing computation time and processing overhead by focusing computational resources on the most relevant scheduling options

Inventive Principle:
Principle #16Partial or excessive action

Data Source

PatentUS11308453B2Method and system for scheduling pieces of materials based on real-time device status
Publication Date: 2022.04.19 BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
  • US11308453B2 patent drawing
  • US11308453B2 patent drawing
  • US11308453B2 patent drawing

AI summary

The present disclosure provides a method and system for scheduling pieces of materials based on a real-time status of a device. Scheduling rules for scheduling the pieces of materials are obtained according to determined parameters. It is determined whether all designated transmission and process tasks of the pieces of materials are completed. If the designated transmission and processing tasks of the pieces of materials are completed, terminating the scheduling of the pieces of materials. If the designated transmission and processing tasks of the pieces of materials are not completed, each of the scheduling rules for scheduling the pieces of materials according to real-time status information of the device are traversed, and according to a traversing result, operation instructions corresponding to the scheduling rules for scheduling the pieces of materials are executed. The real-time status information of the device is updated according to a device status after executions of the operation instructions are completed.