Semiconductor Measurement Using Metasurface Polarization Separation
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Solution Overview
Problem
Existing semiconductor measurement devices struggle with low accuracy in measuring the three-dimensional surface structure and physical properties of samples, and the measurement process is often slow.
Innovation Solution
A semiconductor measurement device incorporating a meta surface structure that separates input light into multiple polarization components and provides phase gradients, allowing for precise detection of reflected polarization components to reconstruct detailed surface topology and physical properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional measurement devices (AFM, WLI) are used to measure surface profile, then the measurement can be performed, but the accuracy is low and measurement information is limited
Solution Approach 1:
The invention segments the measurement process by separating light into multiple polarization components (s-polarization and p-polarization) that interact differently with the sample. This allows simultaneous measurement of surface topology and physical properties through distinct polarization channels, resolving the contradiction between measurement accuracy and information completeness
Solution Approach 2:
The invention changes the measurement parameters by utilizing polarization state as an additional dimension for measurement. By controlling and detecting different polarization components of light, the system extracts multiple types of information (surface height, material properties, stress states) simultaneously, improving both accuracy and information content
2Productivity
If conventional measurement devices are used, then measurement can be performed, but the measurement speed is slow
Solution Approach 1:
The invention achieves continuous measurement by capturing multiple polarization components simultaneously in a single optical path. The parallel detection of s-polarized and p-polarized light eliminates sequential scanning requirements, thereby improving measurement speed without compromising accuracy
Solution Approach 2:
The invention adds the polarization dimension to the traditional optical measurement approach. By exploiting the vector nature of light and measuring multiple polarization components, the system obtains enhanced information content and improved accuracy while maintaining high measurement speed through parallel detection
3Measurement precision
If meta surface structure is introduced to separate polarization components, then measurement accuracy is improved, but device complexity increases
Solution Approach 1:
The meta surface structure acts as an intermediary optical element that efficiently separates polarization components without requiring complex mechanical or optical arrangements. This compact intermediary device achieves high-precision polarization separation while minimizing overall system complexity
Solution Approach 2:
The invention replaces traditional mechanical polarization separation methods (such as rotating polarizers or beam splitters) with a static meta surface structure. This substitution eliminates moving parts and complex mechanical adjustments, reducing device complexity while maintaining or improving measurement accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves high-resolution, wide-field-of-view imaging with improved accuracy and speed by utilizing a meta surface structure to separate and analyze multiple polarization components, providing comprehensive optical information about the semiconductor surface.
Implementation Method 1
a meta surface structure in a path of the first input light having passed the objective lens, the meta surface structure configured to separate the first input light into a first input polarization component and a second input polarization component
Implementation Method 2
provides phase gradients
Implementation Method 3
an objective lens in a path of the first input light having passed through the first relay lens, the objective lens configured to make the first input light incident to a sample
Implementation Method 4
a detector configured to detect the first reflected polarization component, the second reflected polarization component, the third reflected polarization component, and the fourth reflected polarization component
Data Source
AI summary
A semiconductor measurement device includes a first light source unit including a plurality of first point light sources configured to generate first input light, a first relay lens on a path of the first input light, an objective lens configured to make the first input light having passed through the first relay lens incident on a sample, a meta surface structure on a path of the first input light having passed through the objective lens and configured to separate the first input light into a first input polarization component and a second input polarization component, and a detector.