Semiconductor Module Series Resonance for Sub Millimeter Wave Signal Transmission

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Solution Overview

Problem

High-frequency signal transmission is challenging in semiconductor modules for wireless communication equipment operating in sub millimeter wavebands above 300 GHz due to inductance-related impedance issues from bump diameters, leading to signal reflection and radiation, which increases loss and makes it difficult to transmit high-frequency signals effectively.

Innovation Solution

The semiconductor module employs flip chip mounting with signal line and ground coupling bumps, accompanied by signal line and ground side insulating films that create series resonance circuits to cancel inductive impedance, ensuring a short circuit for RF signals and reducing transmission loss by configuring a series resonance circuit with capacitors and inductors at the interface, thereby suppressing impedance increase from inductance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If flip chip mounting with bumps is used to couple signal lines and grounds, then high-frequency signal transmission is enabled compared to wire bonding, but inductance from the bump diameter causes impedance increase and signal loss at sub millimeter wavebands above 300 GHz

Engineering Contradiction:
Improvehigh-frequency signal transmission capabilityVSAvoidsignal loss due to inductance
Core Design Contradiction:
SpeedVSLoss of energy

Solution Approach 1:

The patent changes the electrical parameters of the coupling structure by introducing insulating films with specific capacitance values. The insulating film is designed to have capacitance that compensates for the inductance of the bump, creating a series resonance circuit that cancels the inductive impedance at the target frequency. This parameter change transforms the coupling structure from being inductance-dominated to being resonance-compensated, enabling low-loss signal transmission at sub millimeter wavebands.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The insulating film acts as an intermediary element between the signal line bump and the ground bump. It introduces capacitance that mediates the electrical interaction between signal and ground, creating a series resonance circuit that cancels the harmful inductive effects. This intermediary capacitance allows the system to overcome the inherent inductance limitation of the bump structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Loss of energy

If bump diameter is reduced to decrease inductance, then signal transmission loss is reduced, but manufacturing precision and alignment difficulty increase

Engineering Contradiction:
Improvetransmission lossVSAvoidalignment precision
Core Design Contradiction:
Loss of energyVSManufacturing precision

Solution Approach 1:

Instead of changing the physical dimension (diameter) of the bump, the patent changes the electrical parameter (capacitance) by introducing an insulating film. This allows the bump diameter to remain relatively large for easy manufacturing and alignment, while the capacitance of the insulating film compensates for the inductance, achieving low transmission loss without requiring ultra-precise alignment.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If larger bump diameter is used to ease manufacturing, then manufacturing precision is improved, but inductance increases causing higher signal loss

Engineering Contradiction:
Improvealignment precisionVSAvoidsignal loss
Core Design Contradiction:
Manufacturing precisionVSLoss of energy

Solution Approach 1:

The patent converts the harmful inductive effect of the relatively large bump diameter into a beneficial resonance condition. By introducing the insulating film with appropriate capacitance, the inductance of the large-diameter bump becomes part of a series resonance circuit that cancels the impedance at the target frequency. Thus, the large bump diameter that would normally cause high loss is transformed into an acceptable solution through resonance compensation.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for reliable high-frequency signal transmission in sub millimeter wavebands without significant loss, enhancing the transmission speed of wireless communication equipment by ensuring a short circuit for RF signals and minimizing impedance-related losses.

Implementation Method 1

a signal line side insulating film including a capacitance that causes a series resonance with an inductance by the signal line coupling bump at a target frequency and a ground side insulating film including a capacitance that causes a series resonance with an inductance by the first ground coupling bump at a target frequency

Methodology Applied
Scientific EffectSeries resonance: Resonance

Implementation Method 2

signal line side insulating film including a capacitance that causes a series resonance with an inductance

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 3

inductance by the signal line coupling bump

Methodology Applied
Scientific EffectInductance: Inductor

Data Source

PatentUS9431362B2Semiconductor module
Publication Date: 2016.08.30 FUJITSU LTD
  • US9431362B2 patent drawing
  • US9431362B2 patent drawing
  • US9431362B2 patent drawing

AI summary

A semiconductor module includes a first semiconductor chip including a first signal line and a first ground, a mounting board or a second semiconductor chip including a second signal line and a second ground, a signal line coupling bump that couples the first signal line and the second signal line with each other, a first ground coupling bump that couples the first ground and the second ground with each other, a signal line side insulating film including a capacitance that causes a series resonance with an inductance by the signal line coupling bump at a target frequency and a ground side insulating film including a capacitance that causes a series resonance with an inductance by the first ground coupling bump at a target frequency.