Semiconductor Moving Part Control for Early Ready-State Release
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Solution Overview
Problem
Traditional semiconductor process devices experience low utilization of moving parts due to absolute occupied settings, leading to underutilization and decreased productivity.
Innovation Solution
A control method and apparatus that dynamically manage the movement states of moving parts by setting a current moving part to 'ready' if it is not needed for subsequent sub-task objects, allowing for early release and reassignment, and prioritizing the execution of sub-task objects associated with the current moving part in subsequent process tasks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the coordination module sets moving parts to occupied for all sub-task objects in a process task, then interference between process tasks is avoided, but moving part utilization decreases
Solution Approach 1:
The patent applies dynamics by changing the moving part state management from static (occupied for entire process task) to dynamic (state changes based on actual sub-task execution progress). The coordination module now dynamically adjusts the occupied/ready state of moving parts based on whether they are actually needed for subsequent sub-tasks, allowing flexible state transitions that optimize both reliability and utilization.
Solution Approach 2:
The patent segments the process task execution into individual sub-task objects, allowing independent state management for each sub-task. Instead of occupying moving parts for the entire process task, the system now manages occupation at the sub-task level, enabling finer-grained control where moving parts can be released after completing specific sub-tasks rather than waiting for the entire process task to finish.
2Stability of the object's composition
If moving parts are held in occupied state until all sub-task objects are executed, then task sequence control is maintained, but execution time increases
Solution Approach 1:
The patent applies preliminary action by proactively releasing moving parts to ready state as soon as they are no longer needed for subsequent sub-tasks, rather than waiting passively for all sub-tasks to complete. The coordination module continuously monitors sub-task execution progress and performs early state transitions, allowing moving parts to be prepared for reassignment before the entire process task concludes.
Solution Approach 2:
The patent implements feedback mechanisms where the coordination module continuously monitors the execution status of sub-task objects and adjusts moving part states accordingly. The system receives feedback about which sub-tasks have been executed and uses this information to dynamically update the occupied/ready state of moving parts, creating a closed-loop control system that optimizes execution time while maintaining sequence integrity.
Data Source
AI summary
A control method includes: obtaining a current process task, the process task including a plurality of sub-task objects; determining a current sub-task object and sub-task objects that need to be executed from the plurality of sub-task objects, the sub-task objects that need to be executed are configured to be executed after the current sub-task object is executed; controlling a current moving part associated with the current sub-task object to execute the current sub-task object; after the execution of the current sub-task object is completed, determining standby moving parts associated with the sub-task objects that need to be executed; and in response to the standby moving parts not including the current moving part, setting a movement state of the current moving part to ready.