Semiconductor Optical Device Tapered Waveguide Transition

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Solution Overview

Problem

In semiconductor optical devices, optical intensity fluctuations occur at the connecting portions between high-mesa and buried type waveguides due to differences in width, leading to signal light fluctuations and increased dark current in photodiodes.

Innovation Solution

The semiconductor optical device incorporates a mesa structure with specific waveguide portions and a passivation layer on side surfaces, where the second waveguide portion has a width increasing along the axis and the third waveguide portion has a width decreasing, with a passivation layer on side surfaces, to reduce optical intensity fluctuations and dark current.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a protective film is provided on side surfaces of the buried type waveguide to reduce dark current, then dark current is reduced, but a step portion is formed at the connecting portion with the high-mesa type waveguide causing optical intensity fluctuation

Engineering Contradiction:
Improvedark currentVSAvoidoptical signal stability
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The optical waveguide is divided into multiple portions (first, second, third, and fourth waveguide portions) with different structures. The second waveguide portion has a gradually increasing width to form a transition region that connects the high-mesa type waveguide to the buried type waveguide, eliminating abrupt steps and reducing optical intensity fluctuation while maintaining the protective film for dark current reduction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The waveguide width is varied along the propagation direction (adding a dimensional gradient) to create a tapered transition region. This gradual width change in the second waveguide portion smooths the optical field transition between waveguides of different widths, reducing reflections and intensity fluctuations at the connecting portion.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If the waveguide width changes abruptly between high-mesa and buried type waveguides, then the protective film can be applied, but optical intensity fluctuation occurs due to the step portion

Engineering Contradiction:
Improveprotective film applicationVSAvoidoptical intensity uniformity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The waveguide width is made dynamic (gradually changing) in the second waveguide portion rather than static (constant width). This tapered structure allows the waveguide to smoothly transition between different width regimes, maintaining optical field continuity and reducing intensity fluctuations while still allowing protective film application.

Inventive Principle:
Principle #15Dynamics

3Device complexity

If the mesa structure width is constant, then the waveguide structure is simple, but optical intensity fluctuation occurs at connecting portions between different waveguide types

Engineering Contradiction:
Improvewaveguide structureVSAvoidsignal stability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The optical waveguide is segmented into four distinct portions, each with specific width characteristics. The second waveguide portion serves as a transition segment with gradually increasing width, while other portions maintain constant widths. This segmentation allows the system to balance structural simplicity with optical performance by localizing the complexity only where needed for smooth transitions.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration minimizes optical intensity fluctuations and reduces dark current, ensuring stable signal detection and improved frequency response characteristics in photodiodes.

Implementation Method 1

a passivation layer provided on side surfaces of the light receiving device

Methodology Applied
Scientific EffectPassivation:

Implementation Method 2

an optical waveguide having a mesa structure, the optical waveguide including a first waveguide portion, a second waveguide portion, a third waveguide portion, and a fourth waveguide portion

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Data Source

PatentUS9122003B2Semiconductor optical device
Publication Date: 2015.09.01 SUMITOMO ELECTRIC INDUSTRIES LTD
  • US9122003B2 patent drawing
  • US9122003B2 patent drawing
  • US9122003B2 patent drawing

AI summary

A semiconductor optical device includes a light receiving device; an optical waveguide having a mesa structure, the optical waveguide including first, second, third, and fourth waveguide portions; and a passivation layer provided on a side surface of the light receiving device. The mesa structure in the second waveguide portion has a width increasing along the waveguide axis, and the mesa structure in the third waveguide portion has a width decreasing along the waveguide axis. The second waveguide portion includes first and second regions, the first region being optically coupled to the first waveguide portion and the second region being optically coupled to the third waveguide portion. The passivation layer is provided on side surfaces of the mesa structure in the second region, the third waveguide portion, and the fourth waveguide portion. The mesa structures in the first waveguide portion and the first region have side surfaces without the passivation layer.