Semiconductor Package Buffer Layer Layout for CTE Stress Relief

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Solution Overview

Problem

The semiconductor industry faces challenges in reducing stress and warpage due to coefficient of thermal expansion (CTE) mismatch in semiconductor packages, which can lead to issues like delamination and warping, affecting device yield and reliability.

Innovation Solution

A semiconductor package design that incorporates a buffer layer extending beyond the edges of the package components, with controlled sidewall characteristics to mitigate stress, and multiple buffer layers for enhanced stress reduction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a buffer layer is added to reduce stress and warpage, then reliability improves, but device complexity increases

Engineering Contradiction:
Improvestress reductionVSAvoidpackage structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

A buffer layer is introduced as an intermediary component between the package components and the external environment. This buffer layer absorbs and distributes thermal expansion stresses, preventing direct stress transmission to the package components and reducing warpage, thereby improving reliability without fundamentally changing the core package structure

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The buffer layer's material properties and geometric parameters (such as thickness, lateral dimensions, and material composition) are optimized to achieve the desired stress reduction effect. By adjusting these parameters, the buffer layer can be tailored to match the thermal expansion characteristics of adjacent components, minimizing stress while maintaining a relatively simple structure

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the buffer layer extends beyond package component edges, then stress reduction improves, but manufacturing precision requirements increase

Engineering Contradiction:
Improvestress reductionVSAvoidbuffer layer positioning
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The buffer layer is formed to extend beyond the edges of package components during the packaging process, before final assembly and trimming operations. This preliminary extension ensures that the buffer layer provides adequate stress relief coverage, and subsequent manufacturing steps can trim or planarize the buffer layer to achieve final dimensional precision without compromising the stress reduction function

Inventive Principle:
Principle #10Preliminary action

3Reliability

If multiple buffer layers are used to enhance stress reduction, then reliability improves, but device complexity increases

Engineering Contradiction:
Improvestress reductionVSAvoidbuffer layer structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The stress buffering function is divided into multiple discrete buffer layers, each positioned at different locations or orientations within the package structure. This segmentation allows each buffer layer to address specific stress patterns or thermal expansion mismatches between different component interfaces, providing enhanced and more targeted stress reduction compared to a single monolithic buffer layer

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS20250323214A1Semiconductor package and method for forming the same
Publication Date: 2025.10.16 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250323214A1 patent drawing
  • US20250323214A1 patent drawing
  • US20250323214A1 patent drawing

AI summary

A device includes a package component including an interconnect structure on a first side of a substrate; metal pads on the interconnect structure; a semiconductor die connected to a second side of the substrate; a dielectric material surrounding the package component; a passivation layer extending over the package component and over the dielectric material; a first buffer layer over the passivation layer, wherein the first buffer layer extends over the package component and over the dielectric material, wherein a width of the first buffer layer is greater than a width of the package component and is less than a width of the passivation layer; and conductive connectors penetrating the passivation layer and the first buffer layer to physically contact the metal pads.