Semiconductor Package Composite TIM for Void-Resistant Heat Transfer

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Solution Overview

Problem

The semiconductor industry faces challenges in achieving efficient heat transfer from semiconductor dies to lids in semiconductor packages, primarily due to the risk of void formation during the reflow process, which affects the performance and reliability of the packages.

Innovation Solution

The introduction of a composite metal feature comprising intermetallic compounds, generated by reacting metal features with a melted thermal interface material (TIM) layer, helps to improve heat transfer efficiency by reducing the risk of void formation between semiconductor dies and lids.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a thermal interface material (TIM) layer is used between semiconductor dies and lids, then heat transfer efficiency is improved, but void formation occurs during the reflow process

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidvoid formation
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent changes the material composition parameters of the TIM layer by incorporating intermetallic compounds (such as Cu6Sn5, Cu3Sn, Au2Sn4) alongside traditional TIM materials. This compositional parameter change allows the TIM layer to maintain thermal conductivity while resisting void formation during reflow processing, as the intermetallic compounds provide structural stability at elevated temperatures

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite TIM layer combining traditional thermal interface materials with intermetallic compounds. This composite structure leverages the thermal conductivity of conventional TIM materials while the intermetallic compounds provide void resistance during reflow, effectively resolving the contradiction between heat transfer efficiency and reliability

Inventive Principle:
Principle #40Composite materials

2Reliability

If metal features react with melted TIM layer to form intermetallic compounds, then void formation is reduced, but process complexity increases

Engineering Contradiction:
Improvevoid formation reductionVSAvoidprocess complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by pre-forming metal features (such as copper or gold layers) on the semiconductor dies before applying the TIM layer. These pre-formed metal features are designed to react with the TIM during subsequent reflow processing, automatically generating the desired intermetallic compounds without requiring additional processing steps. This approach reduces void formation while maintaining relatively simple manufacturing processes

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes self-service by allowing the TIM layer and metal features to automatically react and form intermetallic compounds during the standard reflow soldering process. The chemical reaction occurs spontaneously under the reflow conditions, eliminating the need for separate intermetallic formation steps and reducing overall process complexity while achieving the reliability benefit

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances the heat transfer efficiency from semiconductor dies to lids, thereby improving the performance and reliability of semiconductor packages by minimizing void formation during the reflow process.

Implementation Method 1

a first metal feature and a second metal feature react to generate a third metal feature

Methodology Applied
Scientific EffectChemical reaction: Chemical Bonding

Implementation Method 2

improve heat transfer efficiency from semiconductor dies to lids

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250149495A1Semiconductor package and methods
Publication Date: 2025.05.08 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250149495A1 patent drawing
  • US20250149495A1 patent drawing
  • US20250149495A1 patent drawing

AI summary

A semiconductor package and the method of forming the same are provided. The semiconductor package may include a substrate, a semiconductor package component having a semiconductor die bonded to the substrate, a lid attached to the substrate, and a first composite metal feature between the semiconductor package component and the lid. The first composite metal feature may include a first metal feature having a first material and a second metal feature having a second material. The first material may be an intermetallic compound. The second material may be different from the first material.