Semiconductor Package Assembly for Low-Stress Die Bonding

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Solution Overview

Problem

The coefficient of thermal expansion mismatch between different materials in semiconductor packaging causes stress and delamination, leading to potential damage during manufacturing and use.

Innovation Solution

The use of a carrier substrate with tested and good interconnect structures, encapsulated in a first encapsulant, and bonded with semiconductor dies using low-temperature Cu-to-Cu bonding or solder bonding, followed by encapsulation in a second encapsulant, to minimize thermal stress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional solder bump packaging is used to connect semiconductor die to external devices, then electrical connection is achieved, but coefficient of thermal expansion mismatch causes stress and delamination at elevated temperatures

Engineering Contradiction:
Improveconnection reliabilityVSAvoidthermal stress and delamination
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the bonding temperature parameter from traditional high-temperature solder reflow to low-temperature Cu-to-Cu bonding (below 250°C), which reduces thermal stress and prevents delamination while maintaining connection reliability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a composite interconnect structure with multiple layers including Cu-polyimide-Cu configurations, where the polyimide layer acts as a stress buffer to accommodate coefficient of thermal expansion mismatch between different materials, preventing delamination

Inventive Principle:
Principle #40Composite materials

2Adaptability or versatility

If multiple layers of different materials are stacked to form semiconductor die, then functional complexity is achieved, but each material's unique coefficient of thermal expansion causes stress at elevated temperatures

Engineering Contradiction:
Improvefunctional capabilityVSAvoidinternal stress from CTE mismatch
Core Design Contradiction:
Adaptability or versatilityVSStress or pressure

Solution Approach 1:

The patent modifies the bonding temperature parameter to low-temperature processing, which reduces thermal expansion differences between materials and minimizes stress accumulation in multi-layer structures

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces polyimide layers as intermediary materials between copper interconnect layers, where the polyimide serves as a compliant buffer that accommodates differential thermal expansion and prevents stress-induced delamination

Inventive Principle:
Principle #24Intermediary (Mediator)

3Object-affected harmful factors

If low-temperature Cu-to-Cu bonding is used instead of traditional solder bonding, then thermal stress is reduced, but manufacturing process complexity changes

Engineering Contradiction:
Improvethermal stressVSAvoidmanufacturing process simplicity
Core Design Contradiction:
Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The patent changes the bonding temperature parameter to low-temperature range and modifies the bonding mechanism from solder-based to direct Cu-to-Cu bonding, which reduces thermal stress while requiring precise control of bonding parameters to ensure manufacturing quality

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method reduces delamination and enhances board level reliability, allowing for super large package components suitable for high-performance computing applications with improved electrical performance and reliability.

Implementation Method 1

Each one of these different materials may have a unique coefficient of thermal expansion that is different from the other materials. This type of coefficient of thermal expansion mismatch causes each one of the materials to expand a different distance when the semiconductor die is heated during later processing, testing or use.

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

bonded with semiconductor dies using low-temperature Cu-to-Cu bonding or solder bonding

Methodology Applied
Scientific EffectMetallurgical bonding: Welding

Data Source

PatentUS12354969B2Semiconductor device and method of manufacture
Publication Date: 2025.07.08 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12354969B2 patent drawing
  • US12354969B2 patent drawing
  • US12354969B2 patent drawing

AI summary

A method of forming a semiconductor device includes arranging a semi-finished substrate, which has been tested and is known to be good, on a carrier substrate. Encapsulating the semi-finished substrate in a first encapsulant and arranging at least one semiconductor die over the semi-finished substrate. Electrically coupling at least one semiconductor component of the at least one semiconductor die to the semi-finished substrate and encasing the at least one semiconductor die and portions of the first encapsulant in a second encapsulant. Removing the carrier substrate from the semi-finished substrate and bonding a plurality of external contacts to the semi-finished substrate.