Semiconductor Package Inductor Layout for Reduced Pattern Interference

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Solution Overview

Problem

As integrated circuit packages become increasingly complex with multiple device dies packaged together, there is a need for efficient methods to form semiconductor packages that optimize device performance and manufacturing costs, while also allowing for the integration of different technologies and functions within the same package.

Innovation Solution

The method involves forming a semiconductor package with a semiconductor substrate, interconnect structure, and bonding structure, where a die is bonded to the package, and an inductor is formed in a separate region, using conductive patterns and dielectric layers to create a spiral structure, allowing for efficient electrical connections and encapsulation, which reduces interference and enhances yield and performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple device dies are packaged in the same package to achieve more functions, then the device functionality and integration are improved, but the manufacturing complexity and interference between components increase

Engineering Contradiction:
Improvedevice functionalityVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent divides the semiconductor package into distinct functional regions: a first region for bonding the device die and a second region for forming the inductor. This spatial segmentation allows different technologies and functions to be integrated in the same package while minimizing interference between components and simplifying the manufacturing process by allowing independent formation of each component in its designated region.

Inventive Principle:
Principle #1Segmentation

2Reliability

If conductive patterns are formed to connect device dies, then electrical connections are established, but interference between conductive patterns increases

Engineering Contradiction:
Improveelectrical connectionVSAvoidinterference between conductive patterns
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts the inductor formation process from the device die bonding region and places it in a separate second region. This separation removes the source of electromagnetic interference from the sensitive bonding region, allowing reliable electrical connections to be established without interference from nearby conductive patterns used in inductor formation.

Inventive Principle:
Principle #2Taking out (Extraction)

3Productivity

If different technologies are integrated in the same package, then manufacturing cost is reduced and performance is optimized, but the process complexity increases

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidprocess complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent applies different manufacturing processes to different regions of the package: device die bonding processes are applied in the first region while inductor formation processes are applied in the second region. This localized approach allows different technologies to be integrated in the same package with optimized processes for each function, reducing overall process complexity while maintaining manufacturing efficiency.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS11854967B2Semiconductor packages
Publication Date: 2023.12.26 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11854967B2 patent drawing
  • US11854967B2 patent drawing
  • US11854967B2 patent drawing

AI summary

Semiconductor packages are provided. One of the semiconductor packages includes an integrated circuit, a die, an encapsulant and an inductor. The die is bonded to the integrated circuit. The encapsulant encapsulates the die over the integrated circuit. The inductor includes a plurality of first conductive patterns and a plurality of second conductive patterns. The first conductive patterns penetrate through the encapsulant. The second conductive patterns are disposed over opposite surfaces of the encapsulant. The first conductive patterns and the second conductive patterns are electrically connected to one another to form a spiral structure having two ends.