Semiconductor Package Interface Pits for Underfill Delamination

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Solution Overview

Problem

Delamination issues occur at the interface between underfill materials and encapsulants in semiconductor packages, leading to reliability concerns.

Innovation Solution

The semiconductor package design includes a package substrate, an interposer, and chip structures with specific encapsulants and underfill layers. These layers have surface treatments with pores and pits to enhance adhesion, with the underfill layers filling these features to increase bonding strength.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If conventional smooth surfaces are used at interfaces between underfill materials and encapsulants, then manufacturing is simple, but adhesion strength is insufficient leading to delamination

Engineering Contradiction:
Improveadhesion strengthVSAvoidsurface structure complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The encapsulant surface is designed with a porous structure consisting of pores and pits. The underfill material penetrates into these pores and pits, creating mechanical interlocking that significantly enhances adhesion strength between the encapsulant and underfill material, preventing delamination issues.

Inventive Principle:
Principle #31Porous materials

Solution Approach 2:

The porous structure (pores and pits) is pre-formed on the encapsulant surface before the underfill material is applied. This preliminary preparation of the surface structure enables the underfill material to automatically penetrate and bond during the normal packaging process, improving adhesion without adding complex manufacturing steps.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If underfill layers completely fill all pores and pits, then adhesion is maximized, but manufacturing precision requirements increase

Engineering Contradiction:
Improvepackage reliabilityVSAvoidfilling precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The underfill material is designed to partially fill the pores and pits rather than requiring complete filling. This partial filling approach provides sufficient mechanical interlocking for strong adhesion while reducing the stringency of manufacturing precision requirements, making the process more robust and easier to control.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The enhanced adhesion between the encapsulants, underfill layers, and chip structures improves the reliability of the semiconductor package by preventing cracking and breaking due to mechanical stress.

Implementation Method 1

at least a portion of the first underfill layer fills one or more of the first pores

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Implementation Method 2

at least a portion of the second encapsulant fills one or more of the first pores and the pit

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Data Source

PatentUS20250183103A1Semiconductor package
Publication Date: 2025.06.05 SAMSUNG ELECTRONICS CO LTD
  • US20250183103A1 patent drawing
  • US20250183103A1 patent drawing
  • US20250183103A1 patent drawing

AI summary

A semiconductor package includes a base chip, at least one semiconductor chip disposed on the base chip, bump structures disposed between the base chip and the at least one semiconductor chip, an underfill layer surrounding the bump structures, the underfill layer having first pits in a surface thereof, and a first encapsulant in contact with a side surface of the at least one semiconductor chip and the surface of the underfill layer, on the base chip. At least some first pits, among the first pits, are connected to each other to form a first pit tunnel leading inwardly from the surface. At least a portion of the first encapsulant fills the first pit tunnel.