Semiconductor Package Multilayer Isolated Structure for EMI Shielding

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Solution Overview

Problem

Conventional RF modules experience electromagnetic interference (EMI) among semiconductor components despite having metal shielding, highlighting a need for enhanced shielding within the package structure.

Innovation Solution

A semiconductor package design featuring a substrate with semiconductor components, an encapsulant with grooves, and a metal layer that forms a multilayer isolated structure, including metal and air layers, to effectively shield EMI between package units.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a metal thin film covers the periphery of the encapsulant to shield from external EMI, then external electromagnetic interference is blocked, but electromagnetic interference among inner semiconductor components still occurs

Engineering Contradiction:
Improveexternal EMI shieldingVSAvoidinternal EMI among components
Core Design Contradiction:
Object-affected harmful factorsVSObject-generated harmful factors

Solution Approach 1:

The encapsulant is divided into multiple partitioned regions through grooves that extend from the top surface to the bottom surface, creating isolated compartments for different semiconductor components. This segmentation prevents electromagnetic interference between components while maintaining external shielding coverage.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The metal thin film is formed not only on the external periphery of the encapsulant but also within the grooves and on the partitioned regions, creating a nested shielding structure where internal metal layers complement the external shielding to block both external and internal EMI.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Object-generated harmful factors

If grooves are formed in the encapsulant to partition substrate into package units, then internal EMI is reduced through isolation, but the structural integrity and protection of semiconductor components may be compromised

Engineering Contradiction:
Improveinternal EMI isolationVSAvoidencapsulant structural integrity
Core Design Contradiction:
Object-generated harmful factorsVSStrength

Solution Approach 1:

The encapsulant combines the partitioning function of grooves with the reinforcing function of metal thin film deposited on the groove surfaces and partitioned regions. This composite structure maintains structural integrity while achieving EMI isolation through the grooves.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The metal thin film is selectively deposited on specific regions such as groove surfaces and partitioned regions where EMI shielding is most needed, rather than uniformly across the entire encapsulant. This localized approach provides targeted EMI protection while minimizing impact on overall structural integrity.

Inventive Principle:
Principle #3Local quality

3Object-affected harmful factors

If a metal layer is formed on the substrate and encapsulant to encapsulate periphery of package units, then EMI shielding is enhanced, but manufacturing complexity increases

Engineering Contradiction:
ImproveEMI shielding effectivenessVSAvoidmanufacturing process complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The grooves are formed in the encapsulant before the metal thin film is deposited. This preliminary structuring allows the metal deposition process to target specific regions automatically, simplifying the overall manufacturing process while achieving enhanced EMI shielding in critical areas.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The metal thin film serves multiple functions simultaneously: it provides EMI shielding on external surfaces, reinforces the structural integrity of groove regions, and creates conductive paths for grounding. This multi-functionality reduces the need for separate components or processes.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS10074613B2Method of fabricating semiconductor package including cutting encapsulating body and carrier to form packages
Publication Date: 2018.09.11 SILICONWARE PRECISION IND CO LTD
  • US10074613B2 patent drawing
  • US10074613B2 patent drawing
  • US10074613B2 patent drawing

AI summary

A semiconductor package is provided, including: a substrate having opposing first and second surfaces; a plurality of semiconductor components disposed on and electrically connected to the first surface; an encapsulant encapsulating the first surface and the semiconductor components and having at least one first groove that partitions the substrate into a plurality of package units, each of which has at least one of the semiconductor components; and a metal layer formed on the substrate and the encapsulant and encapsulating a periphery of the package units, with the second surface exposed from the metal layer, wherein the metal layer is formed along a wall surface of the first groove, to form a second groove corresponding in position to the first groove and having a metal surface. Therefore, the package units are isolated and form a multilayer isolated structure, including metal layers and air layers, and are electromagnetically shielded from one another.