Semiconductor Package Multilayer Thin Film Structure Substrate Removal

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Solution Overview

Problem

Conventional semiconductor packages with substrates limit miniaturization, increase signal delay due to long interconnection lengths, and are inefficient for high-speed operations and mass production, especially in developing small or stacked communication and electronic devices.

Innovation Solution

A semiconductor package with a multilayer thin film structure, including dielectric layers and redistribution layers, where the semiconductor chip is directly bonded without a substrate, allowing for short interconnections, easy stacking, and simplified mass production by forming packages at the wafer or carrier level.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Weight of moving object

If a substrate with predetermined thickness is used for the package, then the package has structural support, but the package thickness cannot be reduced and weight increases

Engineering Contradiction:
Improvepackage weightVSAvoidpackage thickness
Core Design Contradiction:
Weight of moving objectVSLength of moving object

Solution Approach 1:

The patent removes the traditional substrate from the package structure entirely, extracting only the essential support functions and replacing them with a thin film structure. This eliminates the need for a thick substrate while maintaining structural integrity, directly reducing both package thickness and weight.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent employs a thin film structure as the package support, replacing the rigid thick substrate with a flexible thin film that provides necessary mechanical support. This thin film approach enables significant reduction in package thickness and weight while maintaining structural functionality.

Inventive Principle:
Principle #30Flexible shells and thin films

2Volume of moving object

If a substrate with predetermined thickness is used for the package, then the package has structural support, but the size of the whole package cannot be reduced

Engineering Contradiction:
Improvepackage sizeVSAvoidpackage thickness
Core Design Contradiction:
Volume of moving objectVSLength of moving object

Solution Approach 1:

By removing the substrate entirely and retaining only the thin film structure for support, the patent achieves compact packaging with reduced volume while maintaining necessary structural support.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent transitions from a three-dimensional substrate-based structure to a more planar, thin-film-based structure, effectively reducing the thickness dimension while maintaining area and volume efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If wire bonding is used for electrical interconnection, then the package is easy to manufacture, but signal delay increases and distortion occurs during high-speed operation

Engineering Contradiction:
Improvemanufacturing easeVSAvoidsignal transmission speed
Core Design Contradiction:
Ease of manufactureVSSpeed

Solution Approach 1:

The patent removes the wire bonding process from the manufacturing sequence, eliminating the associated signal delay and distortion problems while maintaining ease of manufacture through alternative interconnection methods.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces the mechanical wire bonding process with a thin-film-based electrical interconnection system that provides shorter signal paths and reduced inductance, improving high-speed signal transmission while maintaining manufacturability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Adaptability or versatility

If conventional BGA package technology is used, then the package structure is established, but diverse stacked packages cannot be realized and mass production efficiency is limited

Engineering Contradiction:
Improvestacking capabilityVSAvoidmass production efficiency
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The thin film structure serves multiple functions simultaneously: structural support, electrical interconnection, and stacking interface. This multi-functionality enables diverse stacked package configurations while maintaining manufacturing efficiency through a universal platform.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent segments the package into modular thin-film layers that can be independently fabricated and then stacked, enabling versatile package configurations while maintaining high production efficiency through standardized modular components.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS7952210B2Semiconductor package and fabrication method thereof
Publication Date: 2011.05.31 POWERTECH TECH SINGAPORE PTE LTD
  • US7952210B2 patent drawing
  • US7952210B2 patent drawing
  • US7952210B2 patent drawing

AI summary

There is provided a semiconductor package comprising: a multilayer thin film structure including a plurality of dielectric layers and at least one or more redistribution layers; a semiconductor chip positioned at one side of the multilayer thin film structure and electrically connected to the redistribution layer; and a solder bump formed at the other side of the multilayer thin film structure. The multilayer thin film structure functions as the substrate for the semiconductor package and realizes the light, thin, short and small BGA package without any additional substrate. A plurality of the packages can be simultaneously formed at wafer level or carrier level, to simplify the process and to be favorable for mass production. After the semiconductor chips are formed at wafer level, only the semiconductor chips having the excellent operation characteristic through the test are selectively bonded to the multilayer thin film structure, to provide the high quality package products in which the fault rate is maximally reduced. The light, thin, short and small BGA package according to the present invention enables small and slim communication devices, displayers and other diverse electronic devices, to be contributed to the increase of the competitiveness of the products to which the BGA package is applied.