Semiconductor Package Porous Heat Dissipation Structure

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Solution Overview

Problem

The challenge of effectively dissipating heat in semiconductor packages as integration density increases, leading to performance limitations and reliability issues due to insufficient heat management.

Innovation Solution

Incorporating a heat dissipation structure with a porous layer over semiconductor devices, featuring a substrate with trenches and a porous layer that increases surface area for enhanced heat dissipation, allowing cooling fluids to flow through and improve thermal conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If integration density of semiconductor components is increased, then more components can be integrated into a given area, but heat dissipation becomes insufficient leading to performance limitations and reliability issues

Engineering Contradiction:
Improveintegration densityVSAvoidheat dissipation
Core Design Contradiction:
Quantity of substanceVSTemperature

Solution Approach 1:

The patent applies porous materials by forming a porous layer within the encapsulant that extends over the semiconductor device. This porous layer provides increased surface area for heat dissipation while maintaining structural integrity. The porous structure allows cooling fluids to penetrate and flow through, enhancing thermal management without compromising the sealed encapsulation.

Inventive Principle:
Principle #31Porous materials

Solution Approach 2:

The patent employs composite materials by combining the porous layer with the encapsulant material. The encapsulant serves dual functions: providing mechanical protection and sealing the semiconductor device, while the integrated porous layer provides thermal management functionality. This composite structure resolves the contradiction by integrating both protective and heat dissipation functions into a unified system.

Inventive Principle:
Principle #40Composite materials

2Temperature

If a heat dissipation structure with porous layer is added, then heat dissipation efficiency is improved, but device complexity increases

Engineering Contradiction:
Improveheat dissipation efficiencyVSAvoidstructure complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent merges the heat dissipation function with the existing encapsulant structure. Rather than adding a separate, complex heat dissipation system, the porous layer is integrated directly into the encapsulant material, allowing thermal management to be achieved through a unified structure that performs both protection and heat dissipation functions simultaneously.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The porous layer provides an efficient heat dissipation pathway without requiring complex external cooling systems. The porous structure naturally facilitates fluid penetration and heat transfer, achieving effective thermal management through a relatively simple additive structure that maintains overall device compactness.

Inventive Principle:
Principle #31Porous materials

3Temperature

If surface area is increased for heat dissipation, then heat transfer efficiency improves, but manufacturing complexity increases

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidmanufacturing complexity
Core Design Contradiction:
TemperatureVSEase of manufacture

Solution Approach 1:

The patent changes the physical parameters of the encapsulant material by introducing porosity. This parameter change transforms the solid encapsulant into a porous structure that provides increased surface area for heat dissipation. The porous layer can be formed through various manufacturing techniques such as infiltration or deposition, allowing control over pore size, distribution, and density to optimize heat transfer while maintaining manufacturability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The porous layer provides increased surface area for heat dissipation through a relatively simple manufacturing approach. By forming the porous structure within the encapsulant during the encapsulation process, the patent avoids the need for separate, complex surface area enhancement steps, thereby maintaining ease of manufacture while achieving improved heat transfer efficiency.

Inventive Principle:
Principle #31Porous materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enhances heat dissipation efficiency and capacity, improving the performance and reliability of semiconductor packages by increasing the surface area for better heat transfer.

Implementation Method 1

a porous layer for providing a high surface area for increasing heat dissipation efficiency

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

allowing cooling fluids to flow through and improve thermal conductivity

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS20250364356A1Package with Improved Heat Dissipation Efficiency and Method for Forming the Same
Publication Date: 2025.11.27 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250364356A1 patent drawing
  • US20250364356A1 patent drawing
  • US20250364356A1 patent drawing

AI summary

In an embodiment, a package is provided. The package includes a semiconductor device; an encapsulant laterally surrounding the semiconductor device; and a heat dissipation structure disposed over the semiconductor device and the encapsulant, wherein the heat dissipation structure includes a plurality of pillars and a porous layer extending over sidewalls of the plurality of pillars.