Semiconductor Package With Printed Protection Film

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Solution Overview

Problem

Current wafer level packaging methods face challenges in achieving size reduction, high-performance interconnects, and heterogeneous integration for system-in-package or system-on-chip applications, particularly in efficiently debonding semiconductor packages from carriers and forming precise connections and markings without additional laser processing.

Innovation Solution

A manufacturing method involving a carrier with a debond layer, dielectric material, and through interlayer vias, where dies are attached and encapsulated, followed by a redistribution layer, conductive elements, and a protection film formed through printing, allowing for efficient debonding and precise marking without laser drilling, enabling cost-effective and high-yield semiconductor package production.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If traditional wafer level packaging methods are used, then semiconductor packages can be produced, but additional laser processing is required for debonding and marking, increasing production cost and time

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidproduction throughput
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent applies preliminary action by pre-forming through-vias that extend through the entire molding compound during the initial packaging process. This eliminates the need for subsequent laser drilling operations, as the connection pathways are already established before the package is completed and mounted. The through-vias are created using conventional photolithography and plating processes integrated into the standard wafer-level packaging flow.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent extracts the laser processing step entirely from the manufacturing process by replacing it with pre-formed through-vias. The harmful and time-consuming laser drilling and marking operations are removed by incorporating the via formation into the earlier molding compound fabrication stage, using standard semiconductor manufacturing techniques instead of post-processing laser methods.

Inventive Principle:
Principle #2Taking out (Extraction)

2Manufacturing precision

If laser drilling is used to form through-vias, then connections can be established, but production cost and processing time increase

Engineering Contradiction:
Improvevia formation precisionVSAvoidprocessing time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The through-vias are formed in advance during the molding compound fabrication process, before the semiconductor die is mounted and before final package completion. This preliminary via formation eliminates the need for time-consuming laser drilling operations later in the process, reducing overall manufacturing cycle time while maintaining precision through controlled photolithography and electroplating processes.

Inventive Principle:
Principle #10Preliminary action

3Volume of moving object

If conventional packaging methods are used, then packages can be manufactured, but size reduction and heterogeneous integration are limited

Engineering Contradiction:
Improvepackage sizeVSAvoidheterogeneous integration capability
Core Design Contradiction:
Volume of moving objectVSAdaptability or versatility

Solution Approach 1:

The patent transitions from planar two-dimensional packaging to three-dimensional vertical integration by forming through-vias that penetrate the molding compound and enabling stacking of multiple semiconductor dies. This vertical dimension allows heterogeneous integration of different die types and technologies in a compact footprint, achieving size reduction while enhancing adaptability and integration capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables efficient debonding of semiconductor packages from carriers, forms precise connections, and reduces production costs by eliminating the need for additional laser marking processes, resulting in higher product throughput and yield while maintaining high performance interconnects.

Implementation Method 1

a protection film is formed over the molding compound and the plurality of dies by a printing process

Methodology Applied
Scientific EffectPrinting: 3D Printing

Data Source

PatentUS11069673B2Semiconductor package and manufacturing method thereof
Publication Date: 2021.07.20 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11069673B2 patent drawing
  • US11069673B2 patent drawing
  • US11069673B2 patent drawing

AI summary

A semiconductor package and a manufacturing method for the semiconductor package are provided. The semiconductor package has a redistribution layer, at least one die over the redistribution layer, through interlayer vias on the redistribution layer and aside the die and a molding compound encapsulating the die and the through interlayer vias disposed on the redistribution layer. The semiconductor package has connectors connected to the through interlayer vias and a protection film covering the molding compound and the die. The protection film is formed by a printing process.