Semiconductor Package Redistribution Structure for Stability

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Solution Overview

Problem

The increasing integration of semiconductor chips leads to higher density of wiring lines, causing issues such as structural instability and electrical reliability concerns in semiconductor packages, particularly due to the complexity of redistribution techniques required for high-speed and compact electronic products.

Innovation Solution

The semiconductor package design incorporates a redistribution structure with specific under-bump patterns and conductive layers, including inclined lateral surfaces and flat top surfaces, to enhance structural stability and electrical properties, and a method of fabrication that forms these patterns to prevent undulation and ensure reliable connections between layers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the integration of semiconductor chips is increased, then the compactness and high-speed performance are improved, but the wiring line density increases causing structural instability and electrical reliability issues

Engineering Contradiction:
Improvechip integrationVSAvoidelectrical reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent divides the conductive pattern into multiple segments: a first conductive pattern in the first wiring layer and a second conductive pattern in the second wiring layer. This segmentation distributes the wiring density across multiple layers, reducing the burden on any single layer and improving both structural stability and electrical reliability while maintaining high chip integration.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar wiring to three-dimensional multi-layer wiring structure. By adding vertical dimension with multiple wiring layers stacked at different heights, the patent achieves higher integration without proportionally increasing wiring density in any single plane, thus maintaining reliability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If the integration of semiconductor chips is increased, then the compactness and high-speed performance are improved, but the wiring line density increases causing structural instability

Engineering Contradiction:
Improvechip integrationVSAvoidstructural stability
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The conductive wiring structure is segmented into multiple layers with distinct functions. The first conductive pattern handles certain signal routes while the second conductive pattern handles other routes, distributing mechanical stress and improving structural stability despite high integration density.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs a composite wiring structure with conductive patterns embedded in dielectric layers. This composite architecture combines the electrical conductivity of metal patterns with the mechanical support of dielectric materials, enhancing overall structural stability while enabling high integration.

Inventive Principle:
Principle #40Composite materials

3Device complexity

If redistribution technique is simplified, then the manufacturing complexity is reduced, but the electrical properties and drive reliability deteriorate

Engineering Contradiction:
Improvemanufacturing complexityVSAvoiddrive reliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The multi-layer conductive pattern structure serves multiple functions simultaneously: it provides electrical connectivity, enables signal redistribution, and maintains structural integrity. This universal design achieves reliable drive performance without requiring overly complex manufacturing processes.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent optimizes parameters such as the spacing between conductive patterns, the thickness of dielectric layers, and the configuration of wiring routes. By carefully adjusting these parameters, the patent achieves reliable electrical properties while keeping the manufacturing process manageable.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS20230109448A1Semiconductor package and method of fabricating the same
Publication Date: 2023.04.06 SAMSUNG ELECTRONICS CO LTD
  • US20230109448A1 patent drawing
  • US20230109448A1 patent drawing
  • US20230109448A1 patent drawing

AI summary

Disclosed are semiconductor packages and fabrication methods thereof. The semiconductor package may include a lower substrate, a lower semiconductor chip, a redistribution layer, an upper semiconductor chip, and a through electrode. The lower substrate may include a first dielectric layer, a first conductive pattern having a wiring pattern and an under-bump pattern, a second dielectric layer, and a second conductive pattern. The under-bump pattern may include a first head part and a first tail part. The first head part may have a first lateral surface on the first dielectric layer that is inclined to a top surface of the first dielectric layer. The second conductive pattern may have a second lateral surface on the second dielectric layer that is perpendicular to a top surface of the second dielectric layer.