Semiconductor Package Conductive Structure for Faster Thermal Dissipation

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Solution Overview

Problem

The challenge in semiconductor manufacturing is to enhance thermal conduction and reduce manufacturing time and cost while maintaining the reliability of semiconductor packages, particularly in the context of 3D packaging and 3DIC devices.

Innovation Solution

Incorporating an electrically conductive adhesive structure between the rear surface of a semiconductor die and a routing structure, which forms a eutectic bond for improved thermal conduction, and using a curing time that is significantly shorter than conventional die attach films to reduce manufacturing time and cost.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional die attach films are used, then the semiconductor package can be manufactured with standard processes, but the curing time is long and thermal conduction is insufficient

Engineering Contradiction:
Improvethermal conductionVSAvoidcuring time
Core Design Contradiction:
TemperatureVSLoss of time

Solution Approach 1:

The patent changes the chemical composition parameters of the adhesive material from conventional die attach film composition to epoxy-based conductive adhesive composition, which enables both faster curing and improved thermal conduction properties

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a composite material system consisting of epoxy resin as base material, conductive fillers (such as metal particles or flakes), and curing agents, which combines the advantages of fast curing with high thermal conductivity in a single adhesive layer

Inventive Principle:
Principle #40Composite materials

2Productivity

If conventional die attach films are used, then the manufacturing process is simple, but the manufacturing time and cost are high

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidmanufacturing time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The patent modifies the curing parameters of the adhesive material by using epoxy-based formulations that cure faster than conventional die attach films, directly reducing the manufacturing cycle time and improving overall productivity

Inventive Principle:
Principle #35Parameter changes

3Temperature

If electrically conductive adhesive structure is used, then thermal conduction is improved, but the device structure becomes more complex

Engineering Contradiction:
Improvethermal dissipationVSAvoidstructure complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent makes the adhesive structure multi-functional by incorporating both electrical conductivity and thermal conduction properties into a single electrically conductive adhesive layer, eliminating the need for separate thermal management layers and thus not increasing overall device complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The conductive adhesive uses composite materials containing conductive fillers within an epoxy matrix, which simultaneously provides electrical conductivity for signal transmission and thermal conductivity for heat dissipation, achieving multiple functions in one layer

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the thermal dissipation of semiconductor packages, improves reliability, and reduces manufacturing time and costs by leveraging a faster curing process for the conductive adhesive.

Implementation Method 1

Incorporating an electrically conductive adhesive structure between the rear surface of a semiconductor die and a routing structure, which forms a eutectic bond for improved thermal conduction

Methodology Applied
Scientific EffectEutectic bond:

Data Source

PatentUS12512384B2Semiconductor package with electrically conductive structure and manufacturing method thereof
Publication Date: 2025.12.30 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12512384B2 patent drawing
  • US12512384B2 patent drawing
  • US12512384B2 patent drawing

AI summary

A semiconductor package includes a first redistribution circuit structure, a semiconductor die, and an electrically conductive structure. The semiconductor die is disposed over and electrically coupled to the first redistribution circuit structure. The electrically conductive structure connects a non-active side of the semiconductor die to a conductive feature of the first redistribution circuit structure, where the semiconductor die is thermally coupled to the first redistribution circuit structure through the electrically conductive structure, and the electrically conductive structure includes a structure of multi-layer with different materials.