Semiconductor Package Via Segmentation for Misalignment Prevention

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Solution Overview

Problem

Semiconductor packages face electrical failures due to misalignment issues during the stacking process, which can lead to undesired contact and electrical shorts between power and ground vias.

Innovation Solution

The semiconductor package design includes grouped power and ground vias arranged in alternating regions, with increasing distances between them, which reduces the likelihood of misalignment-induced contact and electrical shorts, and uses connection terminals to ensure proper alignment and electrical connectivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If vias are arranged in alternating power and ground regions with small spacing to increase integration density, then device complexity is reduced and area is minimized, but misalignment during stacking causes undesired contact and electrical shorts between power and ground vias

Engineering Contradiction:
Improvepackage areaVSAvoidelectrical connection reliability
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The via structure is segmented into multiple types: first vias and second vias in alternating regions, third vias in intermediate regions between power and ground regions. This segmentation creates distinct electrical zones that prevent unintended connections while maintaining compact area utilization.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Third vias act as intermediary elements positioned in intermediate regions between power and ground regions. These intermediary vias serve as buffer zones that prevent direct contact between power and ground vias during stacking, eliminating the need for large spacing while ensuring electrical isolation.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If vias are arranged with large spacing between power and ground regions to prevent misalignment-induced contact, then electrical connection reliability is improved, but area increases and integration density decreases

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidpackage area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The via structure is segmented into multiple types: first vias and second vias in alternating regions, third vias in intermediate regions between power and ground regions. This segmentation creates distinct electrical zones that prevent unintended connections while maintaining compact area utilization.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The problem is solved by adding a vertical dimension to the via arrangement. Multiple via layers (first, second, third vias) are stacked vertically at different positions, transforming a 2D spacing problem into a 3D structured solution that maintains both reliability and compact area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If conventional wire bonding technique is used instead of TSV, then manufacturing complexity is reduced, but performance and speed are limited

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidsignal transmission speed
Core Design Contradiction:
Ease of manufactureVSSpeed

Solution Approach 1:

The patent replaces the mechanical wire bonding process with a TSV-based vertical interconnection system. This substitution eliminates the need for wire bonding while achieving superior electrical performance and signal transmission speed through direct vertical vias penetrating the substrate.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS11495576B2Semiconductor package
Publication Date: 2022.11.08 SAMSUNG ELECTRONICS CO LTD
  • US11495576B2 patent drawing
  • US11495576B2 patent drawing
  • US11495576B2 patent drawing

AI summary

A semiconductor package includes a first die including a signal region and a peripheral region bordering the signal region and having first vias in the peripheral region, a second die stacked on the first die and having second vias at positions corresponding to the first vias in the peripheral region, and first connection terminals between the first die and the second die that are configured to connect the second vias to the first vias, respectively. The peripheral region includes first regions and second regions configured to transmit different signals, which are alternately arranged in a first direction. The first vias are arranged in at least two rows along a second direction intersecting the first direction in each of the first and second regions.